JPH04221705A - Visual inspection device - Google Patents

Visual inspection device

Info

Publication number
JPH04221705A
JPH04221705A JP2405843A JP40584390A JPH04221705A JP H04221705 A JPH04221705 A JP H04221705A JP 2405843 A JP2405843 A JP 2405843A JP 40584390 A JP40584390 A JP 40584390A JP H04221705 A JPH04221705 A JP H04221705A
Authority
JP
Japan
Prior art keywords
height
substrate
point
light
irradiation point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2405843A
Other languages
Japanese (ja)
Inventor
Shinji Hashinami
Tetsuo Hizuka
Giichi Kakigi
Moritoshi Ando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2405843A priority Critical patent/JPH04221705A/en
Publication of JPH04221705A publication Critical patent/JPH04221705A/en
Withdrawn legal-status Critical Current

Links

Abstract

PURPOSE: To enable correct visual inspection by correctly measuring the height of a substrate.
CONSTITUTION: A light scanning means 1 is adapted to apply optical beams substantially vertically or obliquely to a sample 2 in which parts are mounted on a substrate having diffuse transmission, and a light irradiation point is scanned on the sample 2. A height/brightness measuring means 3 is adapted to make scattered light from the light irradiation point into image for the substantially vertically irradiation and make regular reflection light from the irradiation point into an image for the oblique irradiation and measure the height and brightness of the light irradiation point from the position and brightness of an image formation point concerning each image formation point. A substrate judging means 4 judges whether the light irradiation point is on a substrate 2a or not from the measured brightness. A height select means 5 is adapted to select a height measured by oblique irradiation in a portion where the light irradiation point is judged to be on a substrate 2b by the means 4 and select a height measured by the substantially vertical irradiation in a portion where the light irradiation point is judged to be not on the substrate 2a by the means 4. A correct visual inspection can be made by using the selected height.
COPYRIGHT: (C)1992,JPO&Japio
JP2405843A 1990-12-25 1990-12-25 Visual inspection device Withdrawn JPH04221705A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2405843A JPH04221705A (en) 1990-12-25 1990-12-25 Visual inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2405843A JPH04221705A (en) 1990-12-25 1990-12-25 Visual inspection device

Publications (1)

Publication Number Publication Date
JPH04221705A true JPH04221705A (en) 1992-08-12

Family

ID=18515452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2405843A Withdrawn JPH04221705A (en) 1990-12-25 1990-12-25 Visual inspection device

Country Status (1)

Country Link
JP (1) JPH04221705A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0749219A (en) * 1993-08-05 1995-02-21 Nec Corp Measuring device for ic lead height
JP2002257516A (en) * 2001-03-02 2002-09-11 Nagoya Electric Works Co Ltd Method and device for measuring height of solder
JP2009103512A (en) * 2007-10-22 2009-05-14 Hitachi Ltd Wiring pattern treatment apparatus
JP2010139445A (en) * 2008-12-12 2010-06-24 Anritsu Corp Solder printing inspection device
WO2012029975A1 (en) * 2010-09-03 2012-03-08 株式会社ブリヂストン Method and device for detecting shape of band-shaped member, and two-dimensional displacement sensor
WO2019187422A1 (en) * 2018-03-30 2019-10-03 浜松ホトニクス株式会社 Distance measurement unit and light irradiation device

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0749219A (en) * 1993-08-05 1995-02-21 Nec Corp Measuring device for ic lead height
JP2002257516A (en) * 2001-03-02 2002-09-11 Nagoya Electric Works Co Ltd Method and device for measuring height of solder
JP2009103512A (en) * 2007-10-22 2009-05-14 Hitachi Ltd Wiring pattern treatment apparatus
JP2010139445A (en) * 2008-12-12 2010-06-24 Anritsu Corp Solder printing inspection device
WO2012029975A1 (en) * 2010-09-03 2012-03-08 株式会社ブリヂストン Method and device for detecting shape of band-shaped member, and two-dimensional displacement sensor
CN103189713A (en) * 2010-09-03 2013-07-03 株式会社普利司通 Method and device for detecting shape of band-shaped member, and two-dimensional displacement sensor
US9121693B2 (en) 2010-09-03 2015-09-01 Kabushiki Kaisha Bridgestone Method and apparatus for detecting shape of strip-shaped member and two-dimensional displacement sensor
JP5782036B2 (en) * 2010-09-03 2015-09-24 株式会社ブリヂストン Band-shaped member shape detection device and two-dimensional displacement sensor
EP2613122A4 (en) * 2010-09-03 2016-12-14 Kk Bridgestone Method and device for detecting shape of band-shaped member, and two-dimensional displacement sensor
WO2019187422A1 (en) * 2018-03-30 2019-10-03 浜松ホトニクス株式会社 Distance measurement unit and light irradiation device
JP2019178923A (en) * 2018-03-30 2019-10-17 浜松ホトニクス株式会社 Distance measuring unit and light irradiation device
US11428520B2 (en) 2018-03-30 2022-08-30 Hamamatsu Photonics K.K. Distance measurement unit and light irradiation device

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Legal Events

Date Code Title Description
A300 Withdrawal of application because of no request for examination

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 19980312