JPH03179915A - Semiconductor integrated circuit device - Google Patents

Semiconductor integrated circuit device

Info

Publication number
JPH03179915A
JPH03179915A JP1319254A JP31925489A JPH03179915A JP H03179915 A JPH03179915 A JP H03179915A JP 1319254 A JP1319254 A JP 1319254A JP 31925489 A JP31925489 A JP 31925489A JP H03179915 A JPH03179915 A JP H03179915A
Authority
JP
Japan
Prior art keywords
logic circuit
circuit section
output
semiconductor integrated
cmos
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1319254A
Other languages
Japanese (ja)
Inventor
Takaaki Hayashi
孝明 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP1319254A priority Critical patent/JPH03179915A/en
Publication of JPH03179915A publication Critical patent/JPH03179915A/en
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/10Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
    • H01L27/118Masterslice integrated circuits
    • H01L27/11896Masterslice integrated circuits using combined field effect/bipolar technology

Landscapes

  • Logic Circuits (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)

Abstract

PURPOSE:To attain the acceleration, high integration, and low power consump tion of a circuit by comprising an input logic circuit part and an output logic circuit part of Bi-CMOS circuits, and comprising an internal logic circuit of a CMOS circuit. CONSTITUTION:The input logic circuit part 2 is comprised of the Bi-CMOS circuit by combining a Bipolar transistor with a MOS transistor. Therefore, the input current of a PNP transistor at an initial stage when the signal of an external input terminal 21 is set at 'L' flows, however, no stationary current flows on the MOS transistors and the Bipolar transistors after the next stages when the signal is set at 'L' or 'H' at a stationary state, thereby, low power consumption can be realized. The internal logic circuit part 4 is comprised of the CMOS circuit. Therefore, high integration and low power consumption can be attained. The output logic circuit part 6 is comprised of the Bi-CMOS circuit by combining the Bipolar transistor with the MOS transistor.

Description

【発明の詳細な説明】 [産業上の利用分野コ 本発明は、B i −OM OS論理回路と0M0S論
理回路が組み合わされてなる高集積、高駆動出力を持つ
ところのマスタースライス方式の半導体集積回路装置に
関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a master slice type semiconductor integrated circuit having high integration and high drive output, which is formed by combining a B i -OM OS logic circuit and an 0M0S logic circuit. Related to circuit devices.

[従来の技術] 従来のマスタースライス方式の半導体集積回路装置は、
第5図にブロック図で示される様な入力論理回路部、出
力論理回路部、内部論理回路部がともに0−MOS論理
回路により構成されているか、または、第6図の様にB
、j−OMO8論理回路により構成されている。またさ
らには、第7図に示されるような入力論理回路部、出力
論理回路部が、Bipolarトランジスタ回路で構成
され、内部論理回路部は、0M08回路で構成されてい
た。
[Conventional technology] A conventional master slice type semiconductor integrated circuit device is
Either the input logic circuit section, the output logic circuit section, and the internal logic circuit section are all constituted by 0-MOS logic circuits as shown in the block diagram in FIG.
, j-OMO8 logic circuits. Furthermore, the input logic circuit section and the output logic circuit section as shown in FIG. 7 were composed of bipolar transistor circuits, and the internal logic circuit section was composed of a 0M08 circuit.

[発明が解決しようとする課題] 近年においてマスタースライス方式の半導体集積回路装
置(ゲートアレイ半導体集積回路装置)は、高速、高駆
動出力、高集積、低消費電力が望まれてきている。この
観点においては、第5図に示す従来の半導体集積回路装
置は、入力回路部、出力回路部、内部論理回路部が、0
−MO3回路から構成されている為、高集積に出来、又
、高集積になっても消費電力が小さい為、熱が発生しに
くい特徴はあるものの、高駆動出力にすると、MOSト
ランジスタのサイズが大きなものとなり、チップサイズ
が大きくなる問題があった。また出力信号波形は、グラ
ンド電圧とプラス電圧の振幅に振れる為、電磁波輻射ノ
イズ発生の点からも問題があった。この様な点を解決し
ようと、第6図に示す様なり1−0M0S論理回路によ
るゲートアレイ半導体集積回路装置が、提案されている
が内部論理回路部をB i −CM OS回路で構成す
ると、C!MO8回路に新たにBipolar回路が付
加されるため、ベーシク・セルの面積は、従来の0M0
8回路と比較して1.5〜1.7倍程度面檀が増加する
問題がある。一般にゲートアレイ半導体集積回路装置に
おいて内部論理回路部の専有する割合は、チップ全体の
80%〜90%と大きな割合を占めているため、この内
部論理回路部のB i −CM OS回路化の構成はチ
ップサイズの大きな増加をきたす。又、この様な中で、
第7図に示す様な入力論理回路部、出力論理回路部、を
Bipolarトランジスタ回路で構成し、内部論理回
路部はCMOS回路で構成する方法が提案されているが
、この様な構成のゲートアレイ半導体集積回路装置は、
入力論理回路部は、Bip。
[Problems to be Solved by the Invention] In recent years, master slice type semiconductor integrated circuit devices (gate array semiconductor integrated circuit devices) are desired to have high speed, high drive output, high integration, and low power consumption. From this viewpoint, the conventional semiconductor integrated circuit device shown in FIG. 5 has an input circuit section, an output circuit section, and an internal logic circuit section.
-Since it is composed of MO3 circuits, it can be highly integrated, and even with high integration, power consumption is small, so it is difficult to generate heat, but when increasing the drive output to a high drive output, the size of the MOS transistor increases. The problem is that the chip size becomes large. Furthermore, since the output signal waveform swings in amplitude between the ground voltage and the positive voltage, there is also a problem in terms of electromagnetic radiation noise generation. In order to solve this problem, a gate array semiconductor integrated circuit device using a 1-0M0S logic circuit as shown in FIG. 6 has been proposed. C! Since a new Bipolar circuit is added to the MO8 circuit, the area of the basic cell is smaller than the conventional 0M0 circuit.
There is a problem in that the number of facets increases by about 1.5 to 1.7 times compared to 8 circuits. Generally, in a gate array semiconductor integrated circuit device, the internal logic circuit section occupies a large proportion of 80% to 90% of the entire chip. results in a large increase in chip size. Also, in such a situation,
A method has been proposed in which the input logic circuit section and the output logic circuit section are configured with bipolar transistor circuits, as shown in FIG. 7, and the internal logic circuit section is configured with a CMOS circuit. Semiconductor integrated circuit devices are
The input logic circuit section is Bip.

1arトランジスタの為、高速動作をするが、消費電力
が増加する問題がある。又、出力論理回路部においても
B j−p o l a r トランジスタの為、高速
動作をするが、消費電力が増加する問題がある。しかし
内部論理回路部はCMO8回路構成の為、高集積、並び
低消費電力である。
Since it is a 1ar transistor, it operates at high speed, but there is a problem of increased power consumption. In addition, the output logic circuit section also operates at high speed because it is a B jp o l a r transistor, but there is a problem of increased power consumption. However, the internal logic circuit section has a CMO8 circuit configuration, resulting in high integration and low power consumption.

以上述べた様に従来の回路構成によるゲートアレイ半導
体集積回路装置は、高速、高駆動出力、高集積、低消費
電力、な得ようとするとチップサイズが大きくなったり
、消費電力の増大する問題があった。そこで本発明はか
かる問題を解決するもので、その目的とするところは、
チップサイズが大きくならず、高速、高駆動出力、高集
積、低消費電力、の半導体集積回路装置な提供すること
である。
As mentioned above, gate array semiconductor integrated circuit devices with conventional circuit configurations have problems such as increased chip size and increased power consumption when trying to achieve high speed, high drive output, high integration, and low power consumption. there were. Therefore, the present invention is intended to solve this problem, and its purpose is to:
It is an object of the present invention to provide a semiconductor integrated circuit device that does not increase chip size, has high speed, high drive output, high integration, and low power consumption.

[課題を解決するための手段] 本発明の半導体集積回路装置は、Bipolar(バイ
ポーラ)トランジスタとMOSトランジスタが、組合わ
されたB i −CM OS回路と、MOSトランジス
タが組み合わされてなるCMOS回路から構成されるマ
スタースライス方式の半導体集積回路装置において、入
力論理回路部、出力論理回路部は、B i −OM O
s回路から構成され内部論理回路部は、C!MO8回路
から構成されることを特徴とする。
[Means for Solving the Problems] A semiconductor integrated circuit device of the present invention includes a B i -CMOS circuit in which a bipolar transistor and a MOS transistor are combined, and a CMOS circuit in which a MOS transistor is combined. In the master slice type semiconductor integrated circuit device, the input logic circuit section and the output logic circuit section are B i -OM O
The internal logic circuit section consists of C!s circuits. It is characterized by being composed of MO8 circuits.

[1′β用コ 本発明の上述の構成によれば、入力論理回路部、出力論
理回路部は、13 i −OM OS回路より構成され
ている為、低消費電力であり、出力回路部を高駆動出力
としても、最終段トランジスタがBipolarトラン
ジスタの為、面積が大きくならない。又、出力波形も振
幅が小さいため電磁波輻射ノイズが小さい。その上、内
部論理回路部はCMOS回路から構成されるため、高集
積、低消費電力である。
[For 1'β] According to the above-described configuration of the present invention, the input logic circuit section and the output logic circuit section are composed of 13 i-OM OS circuits, so power consumption is low and the output circuit section is Even with a high drive output, the area does not become large because the final stage transistor is a bipolar transistor. Furthermore, since the output waveform also has a small amplitude, electromagnetic radiation noise is small. Furthermore, since the internal logic circuit section is composed of a CMOS circuit, it has high integration and low power consumption.

[実施例] 以下に本発明の実施例を図面にもとづいて説明する。第
1図は、本発明による半導体集積回路装置(ゲートアレ
イ半導体集積回路装置)の構成図である。第1図の(2
)はB1−CMOS回路から構成される入力論理回路部
であり、(1)は、外部からの入力信号端子、(3)は
、入力論理回路部と内部論理回路部を接続する信号線で
ある。
[Examples] Examples of the present invention will be described below based on the drawings. FIG. 1 is a configuration diagram of a semiconductor integrated circuit device (gate array semiconductor integrated circuit device) according to the present invention. (2) in Figure 1
) is an input logic circuit section composed of a B1-CMOS circuit, (1) is an input signal terminal from the outside, and (3) is a signal line connecting the input logic circuit section and the internal logic circuit section. .

この入力論理回路部は、第2図の様にBipOlarト
ランジスタとMOSトランジスタが、組合わされたB1
−CMo5回路構成となっている。
This input logic circuit section consists of a B1 transistor in which a BipOlar transistor and a MOS transistor are combined as shown in FIG.
- It has a CMo5 circuit configuration.

このため外部入力端子(21)の信号が、to Luの
時の初段のpNpトランジスタの入力電流は流れるもの
の、次段以降のMOSトランジスタ、Bipolarト
ランジスタにおいては、信号のat Lpp又は、II
 H#lの定常時における定常電流が流れないため、消
費電力は小さい。(22)は、入力論理回路部から内部
論理回路部へ接続する信号ラインである。第1図の(4
)は、CMOS回路から構成される内部論理回路部を表
している。
Therefore, when the signal of the external input terminal (21) is to Lu, the input current of the pNp transistor in the first stage flows, but in the MOS transistors and Bipolar transistors in the subsequent stages, the signal is at Lpp or II.
Since no steady current flows during the steady state of H#l, power consumption is small. (22) is a signal line connecting from the input logic circuit section to the internal logic circuit section. (4 in Figure 1)
) represents an internal logic circuit section composed of a CMOS circuit.

この内部論理回路部は、第5図の様なCMOS回路によ
り構成している。このため高集積、低消費電力が得られ
る。(51)は、入力論理回路部から内部論理回路部へ
入ってくる信号ラインであり(62)は、内部論理回路
部から出力論理回路部へ出ていく信号ラインである。第
5図は、内部論理回路部で組まれたCMOSトランジス
タ構成のTrue論理回路の一例であり、−膜内には、
各種の論理回路が構成される。第1図の(6)はB i
 −CM OS回路から構成される出力論理回路部を表
している。(5)は、内部論理回路部と出力論理回路部
とを接続する信号ライン、(7)は、外部用カイぎ号端
子である。この出力論理回路部は、第4図の様にBip
o’lar トランジスタとMOSトランジスタが、組
合わされたB1−−0M0SJOJ路構成となっている
。(41)は、内部論理回路部から出力論理回路部へ入
ってくる信号ラインであり(42)は、出力論理回路部
から外部へ信号の出る出力端子である。このB i −
CM O8回路構成によれば、従来のB i p O]
−a r トランジスタのみから構成された出力論理回
路部と比較すると高駆動出力の点では変わらないが、C
MOSと併合している為、低消費電力である。又、0M
O3回路構戒と比較すると、高駆動出力を得るためには
、CMO8回路構成の場合には、最終段の出力用MO3
トランジスタが大きなものとなるが、B j、 p o
 1 a r トランジスタの場合は、比較的に小さく
て済む。更に出力信号の振幅波形も0M05回路に比較
して小さいため、電磁波輻射ノイズが小さい。
This internal logic circuit section is constituted by a CMOS circuit as shown in FIG. Therefore, high integration and low power consumption can be achieved. (51) is a signal line entering the internal logic circuit section from the input logic circuit section, and (62) is a signal line exiting from the internal logic circuit section to the output logic circuit section. FIG. 5 is an example of a true logic circuit with a CMOS transistor configuration assembled in an internal logic circuit section, in which - inside the film,
Various logic circuits are configured. (6) in Figure 1 is B i
-CM This represents an output logic circuit section composed of an OS circuit. (5) is a signal line connecting the internal logic circuit section and the output logic circuit section, and (7) is an external signal terminal. This output logic circuit section has Bip as shown in FIG.
The o'lar transistor and the MOS transistor are combined in a B1--0M0SJOJ path configuration. (41) is a signal line that enters the output logic circuit section from the internal logic circuit section, and (42) is an output terminal that outputs a signal from the output logic circuit section to the outside. This B i-
According to the CM O8 circuit configuration, the conventional B i p O]
-a r Compared to the output logic circuit section composed only of transistors, there is no difference in terms of high drive output, but C
Since it is combined with MOS, power consumption is low. Also, 0M
Compared to the O3 circuit configuration, in order to obtain high drive output, in the case of the CMO8 circuit configuration, the final stage output MO3
Although the transistor becomes large, B j, p o
In the case of a 1 a r transistor, it is relatively small. Furthermore, since the amplitude waveform of the output signal is also smaller than that of the 0M05 circuit, electromagnetic radiation noise is small.

[発明の効果] 本発明は以上説明したような構成をとることkより、従
来のゲートアレイ半導体集積回路装置では得られなかっ
た、高速、高駆動出力、高集積、低消費電力の半導体集
積回路装置が実現できるものである。
[Effects of the Invention] Since the present invention has the configuration described above, it provides a semiconductor integrated circuit with high speed, high drive output, high integration, and low power consumption, which cannot be obtained with conventional gate array semiconductor integrated circuit devices. This is what the device can achieve.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明における半導体集積回路装置(ゲートア
レイ半導体集積回路装置)の構成図である。 (1)・・・・・・・・・入力信号端子(2)・・・・
・・・・・B i、 −CM OS回路より構成された
入力論理回路部 (3)・・・・・・・・・入力論理回路部と内部論理回
路部を接続する信号線 (4)・・・・・・・・・0M08回路から構成される
内部論理回路部 (5)・・・・・・・・・内部論理回路部と出力論理回
路部を接続する信号線 (6)・・・・・・・・・B1−CMOS回路から構成
される出力論理回路部 (7)・・・・・・・・・出力信号端子第2図は、本発
明の半導体集積回路装置(ゲートアレイ半導体集積回路
装置)の構成要素であるところのJ3i−0M08回路
より構成された入力論理回路部の回路図。 ぐツ1)・・・・・・外部入力信号端子(22)・・・
・・入力論理回路部から出力される信号ライン (25)・・・・・V d、 (l電源(24)・・・
・・・GND電源 第6図は、本発明の半導体集積回路装置(ゲートアレイ
半導体集積回路装置)の構成要素であるところのCMO
S回路より構成された内部論理回路部の回路図。 (31)・・・・・・入力論理回路部から内部論理回路
部へ入る信号ライン (62)・・・・・・内部論理回路部から出力論理回路
部へ出力する信号ライン (55)・・・・・・V d、 d電源(34)・・・
−・・GND電源 第4図は、本発明の半導体集積回路装置(ゲートアレイ
半導体集積回路装置)の構成要素であるところのB i
−CM OS回路より構成された出力論理回路部の回路
図。 (41)・・・・・・内部論理回路から出力論理回路へ
入る信号ライン (42)・・・・・・外部出力信号端子(46)・・・
・・・Vt1d電源 (44)・・・・・・Vs日電電 源5図は、従来のCMOS回路のみから構成された半導
体集積回路装置(ゲートアレイ半導体集積回路装置)の
構成図である。 (51)、・・・・・入力信号端子 (52)・・・・・0M08回路より構成された入力論
理回路部 (55)・・・・・・入力論理回路部と内部論理回路部
を接続する信号線 (54)・・・・・・CMOS回路から構成される内部
論理回路部 (55)・・・・・・内部論理回路部と出力論理回路部
を接続する信号線 (56)・・・・・CMOS回路から構成される出力論
理回路部 (57)・・・・・出力信号端子 第6図は、従来のB i −CM OS回路のみから構
成された半導体集積回路装置(ゲートアレイ半導体集積
回路装置)の構成図である。 (61)・・・・・・入力信号端子 (62)・・・・・B i −CM OS回路より構成
された入力論理回路部 (63)・・・・・入力論理回路部と内部論理回路部を
接続する信号線 (64)・・・・・B i −CM OS回路から構成
される内部論理回路部 (65)・・・・・内部論理回路部と出力論理回路部を
接続する信号線 (66)・・・・・Bi−0M08回路から構成される
出力論理回路部 (67)・・・・・・出力信号端子 第7図(工、従来のCMOS回路とBi−0M08回路
から構成された半導体集積回路装置(ゲートアレイ半導
体集積回路装置)の構成図である。 (71)・・・・・入力信号端子 )・・・・・・Bipolarトランジスタ回路より構
成された入力論理回路部 )・・・・・・入力論理回路部と内部論理回路部を接続
する信号線 )・・・・・・0M08回路から構成される内部論理回
路部 )・・・・・・内部論理回路部と出力論理回路部を接続
する信号軸 )e・◆・・―Bipolar トランジスタ回路から
構成される出力論理回路部 )・・・・・出力信号端子 以上
FIG. 1 is a configuration diagram of a semiconductor integrated circuit device (gate array semiconductor integrated circuit device) according to the present invention. (1)...Input signal terminal (2)...
...Input logic circuit section (3) composed of B i, -CM OS circuit ...... Signal line (4) connecting the input logic circuit section and internal logic circuit section. ......Internal logic circuit section (5) consisting of 0M08 circuits...Signal line (6) connecting the internal logic circuit section and output logic circuit section... . . . Output logic circuit section (7) consisting of a B1-CMOS circuit . . . Output signal terminals in FIG. FIG. 2 is a circuit diagram of an input logic circuit section composed of a J3i-0M08 circuit, which is a component of the circuit device. Shoes 1)... External input signal terminal (22)...
...Signal line (25) output from the input logic circuit section...V d, (l power supply (24)...
...GND power supply Figure 6 shows the CMO which is a component of the semiconductor integrated circuit device (gate array semiconductor integrated circuit device) of the present invention.
FIG. 3 is a circuit diagram of an internal logic circuit section composed of an S circuit. (31)...Signal line entering from the input logic circuit section to the internal logic circuit section (62)...Signal line outputting from the internal logic circuit section to the output logic circuit section (55)... ...V d, d power supply (34)...
--GND power supply Figure 4 shows the B i which is a component of the semiconductor integrated circuit device (gate array semiconductor integrated circuit device) of the present invention.
- A circuit diagram of an output logic circuit section composed of a CM OS circuit. (41)...Signal line entering from the internal logic circuit to the output logic circuit (42)...External output signal terminal (46)...
. . . Vt1d power supply (44) . . . Vs Nichiden power supply 5 FIG. 5 is a configuration diagram of a semiconductor integrated circuit device (gate array semiconductor integrated circuit device) composed only of conventional CMOS circuits. (51),...Input signal terminal (52)...Input logic circuit section composed of 0M08 circuit (55)...Connects input logic circuit section and internal logic circuit section Signal line (54) to connect the internal logic circuit section (55) consisting of a CMOS circuit...Signal line (56) connecting the internal logic circuit section and the output logic circuit section... . . . Output logic circuit section (57) composed of CMOS circuits . . . Output signal terminals Fig. 6 shows a conventional semiconductor integrated circuit device (gate array semiconductor FIG. 2 is a configuration diagram of an integrated circuit device (integrated circuit device). (61) Input signal terminal (62) Input logic circuit section composed of B i -CM OS circuit (63) Input logic circuit section and internal logic circuit Signal line connecting the internal logic circuit section (64)...Internal logic circuit section (65) consisting of the B i -CM OS circuit...Signal line connecting the internal logic circuit section and the output logic circuit section (66)...Output logic circuit section consisting of a Bi-0M08 circuit (67)...Output signal terminal Fig. 7 (Eng., consisting of a conventional CMOS circuit and a Bi-0M08 circuit) (71)...Input signal terminal)...Input logic circuit section composed of Bipolar transistor circuit) ...Signal line connecting input logic circuit section and internal logic circuit section) ...Internal logic circuit section consisting of 0M08 circuit) ...Internal logic circuit section and output logic Signal axis that connects the circuit section) e, ◆... - Output logic circuit section consisting of Bipolar transistor circuit) ... Output signal terminal or higher

Claims (1)

【特許請求の範囲】[Claims]  BipolarトランジスタとMOSトランジスタが
、組合わされたBi−CMOS回路と、MOSトランジ
スタが組み合わされてなるCMOS回路から構成される
マスタースライス方式の半導体集積回路装置において、
入力論理回路部、出力論理回路部は、Bi−CMOS回
路から構成され、内部論理回路部は、CMOS回路から
構成されることを特徴とする半導体集積回路装置。
In a master slice type semiconductor integrated circuit device consisting of a Bi-CMOS circuit in which a Bipolar transistor and a MOS transistor are combined, and a CMOS circuit in which a MOS transistor is combined,
1. A semiconductor integrated circuit device, wherein the input logic circuit section and the output logic circuit section are composed of Bi-CMOS circuits, and the internal logic circuit section is composed of a CMOS circuit.
JP1319254A 1989-12-08 1989-12-08 Semiconductor integrated circuit device Pending JPH03179915A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1319254A JPH03179915A (en) 1989-12-08 1989-12-08 Semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1319254A JPH03179915A (en) 1989-12-08 1989-12-08 Semiconductor integrated circuit device

Publications (1)

Publication Number Publication Date
JPH03179915A true JPH03179915A (en) 1991-08-05

Family

ID=18108144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1319254A Pending JPH03179915A (en) 1989-12-08 1989-12-08 Semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPH03179915A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101596013B1 (en) * 2014-12-19 2016-03-07 로고스(주) Concrete repair precess using mtltiple vibrator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101596013B1 (en) * 2014-12-19 2016-03-07 로고스(주) Concrete repair precess using mtltiple vibrator

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