JPH031788Y2 - - Google Patents
Info
- Publication number
- JPH031788Y2 JPH031788Y2 JP11292884U JP11292884U JPH031788Y2 JP H031788 Y2 JPH031788 Y2 JP H031788Y2 JP 11292884 U JP11292884 U JP 11292884U JP 11292884 U JP11292884 U JP 11292884U JP H031788 Y2 JPH031788 Y2 JP H031788Y2
- Authority
- JP
- Japan
- Prior art keywords
- thermocouple
- temperature
- rod member
- temperature measuring
- protective tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000001681 protective effect Effects 0.000 claims description 34
- 239000000725 suspension Substances 0.000 claims description 30
- 239000000463 material Substances 0.000 claims description 28
- 125000006850 spacer group Chemical group 0.000 claims description 10
- 239000012298 atmosphere Substances 0.000 claims description 7
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 238000009529 body temperature measurement Methods 0.000 description 13
- 238000012360 testing method Methods 0.000 description 10
- 238000010292 electrical insulation Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910000691 Re alloy Inorganic materials 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009776 industrial production Methods 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001513 hot isostatic pressing Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052575 non-oxide ceramic Inorganic materials 0.000 description 1
- 239000011225 non-oxide ceramic Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B30—PRESSES
- B30B—PRESSES IN GENERAL
- B30B11/00—Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses
- B30B11/001—Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses using a flexible element, e.g. diaphragm, urged by fluid pressure; Isostatic presses
- B30B11/002—Isostatic press chambers; Press stands therefor
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Powder Metallurgy (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11292884U JPS6128029U (ja) | 1984-07-24 | 1984-07-24 | 高温高圧炉における温度計測装置 |
DE19853513441 DE3513441A1 (de) | 1984-04-14 | 1985-04-15 | Temperaturmessfuehler |
US07/258,113 US5092938A (en) | 1984-04-14 | 1988-10-14 | Temperature detector for use in high temperature and high pressure furnaces |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11292884U JPS6128029U (ja) | 1984-07-24 | 1984-07-24 | 高温高圧炉における温度計測装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6128029U JPS6128029U (ja) | 1986-02-19 |
JPH031788Y2 true JPH031788Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-01-18 |
Family
ID=30671963
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11292884U Granted JPS6128029U (ja) | 1984-04-14 | 1984-07-24 | 高温高圧炉における温度計測装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6128029U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1984
- 1984-07-24 JP JP11292884U patent/JPS6128029U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6128029U (ja) | 1986-02-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7268321B2 (en) | Wafer holder and semiconductor manufacturing apparatus | |
JP4285789B2 (ja) | 縦型電気炉 | |
JP3404531B2 (ja) | 温度校正方法および装置 | |
JPH031788Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
US10215645B2 (en) | Thermometer | |
JPH031790Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
JPH0317075B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
JP4539895B2 (ja) | MoSi2を主成分とするヒーターの取付け方法 | |
JPH0718446A (ja) | 熱処理装置 | |
US11815403B2 (en) | Specialty control thermocouple for vacuum heat treat furnaces | |
Pavlasek et al. | Effects of quartz glass insulation on platinum gold thermocouples | |
EP1544314B1 (en) | Extended temperature range EMF device | |
JPH01272932A (ja) | 高純度高温雰囲気用熱電対の保護装置 | |
KR100317239B1 (ko) | 가열로온도검출용스파이크형열전대소자 | |
US20050129091A1 (en) | Extended temperature range EMF device | |
US5868497A (en) | Thermocouple for use in an apparatus for manufacturing a semiconductor device | |
JPH10142072A (ja) | 測温システム | |
JP5348447B2 (ja) | セルの特性評価装置 | |
Moiseeva | The prospects for developing standard thermocouples of pure metals | |
JP2000208236A (ja) | 炉壁へのセラミックヒ―タ取付構造 | |
Thomas | A Furnace for Thermocouple Calibrations to 2,200 C | |
EP3712110A1 (en) | Polycrystalline silicon manufacturing apparatus | |
Pavlasek et al. | Development in constructing Au/Pt thermoelectric sensors | |
CN108489626B (zh) | 一种用于测量浮法玻璃熔窑中锡槽温度的热电偶装置 | |
JPH07273057A (ja) | 半導体製造装置 |