JPH0317581U - - Google Patents
Info
- Publication number
- JPH0317581U JPH0317581U JP7813889U JP7813889U JPH0317581U JP H0317581 U JPH0317581 U JP H0317581U JP 7813889 U JP7813889 U JP 7813889U JP 7813889 U JP7813889 U JP 7813889U JP H0317581 U JPH0317581 U JP H0317581U
- Authority
- JP
- Japan
- Prior art keywords
- power source
- characteristic measuring
- semiconductor device
- measuring device
- transient voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 230000001052 transient effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は、この考案の一実施例の半導体素子の
特性測定装置の一部断面正面図、第２図は、本実
施例の半導体素子にかかる時間対電圧特性図、第
３図は、半導体ウエーハの一部拡大図を含む平面
図、第４図は、従来の半導体素子の特性測定装置
を示す一部断面正面図、第５図は従来の半導体素
子にかかる時間対電圧特性図である。
１……半導体素子、２……半導体ウエーハ、３
……可動ステージ、４……ニードル、５……導線
、６……プローバ、８……テスタ（過渡電圧を含
まない電源）。
FIG. 1 is a partial cross-sectional front view of a semiconductor device characteristic measuring device according to an embodiment of the present invention, FIG. 2 is a time vs. voltage characteristic diagram of the semiconductor device of this embodiment, and FIG. FIG. 4 is a plan view including a partially enlarged view of a wafer, FIG. 4 is a partially sectional front view showing a conventional semiconductor device characteristic measuring apparatus, and FIG. 5 is a time-voltage characteristic diagram of a conventional semiconductor device. 1...Semiconductor element, 2...Semiconductor wafer, 3
...Movable stage, 4...Needle, 5...Conducting wire, 6...Prober, 8...Tester (power supply that does not include transient voltage).
Claims (1)
して過渡電圧を含まない電源を使用したことを特
徴とする半導体特性測定装置。 What is claimed is: 1. A semiconductor characteristic measuring device characterized in that a power source that does not include transient voltage is used as a tester power source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7813889U JPH0317581U (en) | 1989-06-30 | 1989-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7813889U JPH0317581U (en) | 1989-06-30 | 1989-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0317581U true JPH0317581U (en) | 1991-02-21 |
Family
ID=31621144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7813889U Pending JPH0317581U (en) | 1989-06-30 | 1989-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0317581U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11293978B2 (en) | 2017-09-12 | 2022-04-05 | Tokyo Electron Limited | Voltage application device for testing plurality of devices and method of forming output voltage waveform |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5719673A (en) * | 1980-07-10 | 1982-02-01 | Yokogawa Hewlett Packard Ltd | Electric current detector with resistance change-over circuit |
| JPS61169770A (en) * | 1985-01-23 | 1986-07-31 | Chuo Riken:Kk | Power source circuit for tester |
-
1989
- 1989-06-30 JP JP7813889U patent/JPH0317581U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5719673A (en) * | 1980-07-10 | 1982-02-01 | Yokogawa Hewlett Packard Ltd | Electric current detector with resistance change-over circuit |
| JPS61169770A (en) * | 1985-01-23 | 1986-07-31 | Chuo Riken:Kk | Power source circuit for tester |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11293978B2 (en) | 2017-09-12 | 2022-04-05 | Tokyo Electron Limited | Voltage application device for testing plurality of devices and method of forming output voltage waveform |