JPH0317446Y2 - - Google Patents
Info
- Publication number
- JPH0317446Y2 JPH0317446Y2 JP6695086U JP6695086U JPH0317446Y2 JP H0317446 Y2 JPH0317446 Y2 JP H0317446Y2 JP 6695086 U JP6695086 U JP 6695086U JP 6695086 U JP6695086 U JP 6695086U JP H0317446 Y2 JPH0317446 Y2 JP H0317446Y2
- Authority
- JP
- Japan
- Prior art keywords
- microstrip line
- gaas
- integrated circuit
- insulating film
- microwave integrated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 15
- 239000011248 coating agent Substances 0.000 claims description 8
- 238000000576 coating method Methods 0.000 claims description 8
- -1 gallium-arsenide compound Chemical class 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical class [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 11
- 239000004020 conductor Substances 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Landscapes
- Amplifiers (AREA)
- Local Oxidation Of Silicon (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Junction Field-Effect Transistors (AREA)
- Waveguides (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6695086U JPH0317446Y2 (enrdf_load_stackoverflow) | 1986-05-06 | 1986-05-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6695086U JPH0317446Y2 (enrdf_load_stackoverflow) | 1986-05-06 | 1986-05-06 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62178537U JPS62178537U (enrdf_load_stackoverflow) | 1987-11-12 |
JPH0317446Y2 true JPH0317446Y2 (enrdf_load_stackoverflow) | 1991-04-12 |
Family
ID=30905418
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6695086U Expired JPH0317446Y2 (enrdf_load_stackoverflow) | 1986-05-06 | 1986-05-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0317446Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-05-06 JP JP6695086U patent/JPH0317446Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS62178537U (enrdf_load_stackoverflow) | 1987-11-12 |
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