JPH03173954A - Production of optical disk - Google Patents

Production of optical disk

Info

Publication number
JPH03173954A
JPH03173954A JP1312645A JP31264589A JPH03173954A JP H03173954 A JPH03173954 A JP H03173954A JP 1312645 A JP1312645 A JP 1312645A JP 31264589 A JP31264589 A JP 31264589A JP H03173954 A JPH03173954 A JP H03173954A
Authority
JP
Japan
Prior art keywords
resin
stamper
liquid
resin liquid
resin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1312645A
Other languages
Japanese (ja)
Inventor
Shinji Otaki
大滝 信治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1312645A priority Critical patent/JPH03173954A/en
Publication of JPH03173954A publication Critical patent/JPH03173954A/en
Pending legal-status Critical Current

Links

Landscapes

  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Manufacturing Optical Record Carriers (AREA)

Abstract

PURPOSE:To produce a 2P resin film having high quality with simple operations by irradiating at least the outer peripheral positions of the 2P resin film with UV rays throttled to a beam shape and scanning the beam in a circumferential direction, thereby curing the 2P resin film. CONSTITUTION:The UV beam is scanned in the position of the outside diameter Ro and inside irradiater Ri when the positions 6, 7 are irradiated with the UV rays from above a transparent substrate 4 and a stamper 1 is rotated. If, therefore, the uncured 2P resin liquid diffuses and arrives at the scanning position of the UV beam, the liquid cures in this position and does not diffuse any more. The 2P resin is not cured in the part where the resin liquid does not arrive at the position of the outside diameter Ro and, therefore, the liquid diffuses in succession to the position of the outside diameter Ro and is irradiated with the UV beam, by which the resin is cured. As a result, the diffusion of the 2P resin liquid stops finally in the position of the outside diameter Ro over the entire periphery and the outer periphery of the 2P resin film is truly circular. The UV beam is scanned in the inside diameter position Ri on the inner peripheral side as well in exactly the same manner and, therefore, the 2P resin liquid is cured by the UV rays when the liquid arrives at the inside diameter position Ri. The truly circular inside diameter Ri is thus obtd.

Description

【発明の詳細な説明】 〔概要] スタンパ−上に形成されたパターンを2P樹脂を利用し
て転写することで量産が行なわれる光ディスクの製造方
法、特に紫外線硬化処理前の2P樹脂膜の懲戒方法に関
し、 スタンパ−とガラス基板との間に2P樹脂を拡散する際
に、2P樹脂膜が一定の径となるような製造方法を実現
することを目的とし、 スタンパ−と透明基板との間に2P樹脂液を挟んで膜状
に拡散させた状態で紫外線を照射し、スタンパ−パター
ンが転写された2P樹脂膜を硬化させた後、スタンパ−
から剥離する方法において、スタンパ−と透明基板との
間で2P樹脂液を膜状に拡散させる際に、 2P樹脂膜の外周位置および内周位置のうち、少なくと
も外周位置に、ビーム状に絞った紫外線を照射し、 かつ、該ビーム状紫外線およびスタンパ−を相対的に回
転させることで、ビーム状紫外線を同一円周上で走査し
、 該走査位置に到達した2P樹脂液を硬化させるように構
成する。
[Detailed Description of the Invention] [Summary] A method for manufacturing optical discs that is mass-produced by transferring a pattern formed on a stamper using a 2P resin, particularly a method for disciplining a 2P resin film before ultraviolet curing treatment. Regarding this, the purpose is to realize a manufacturing method in which the 2P resin film has a constant diameter when the 2P resin is diffused between the stamper and the glass substrate. After the resin liquid is sandwiched and diffused into a film, UV rays are irradiated to harden the 2P resin film to which the stamper pattern has been transferred, and then the stamper
In the method of peeling off from the stamper, when the 2P resin liquid is diffused into a film between the stamper and the transparent substrate, a beam is focused at least on the outer periphery and the inner periphery of the 2P resin film. By irradiating ultraviolet rays and relatively rotating the beam-shaped ultraviolet rays and the stamper, the beam-shaped ultraviolet rays are scanned on the same circumference, and the 2P resin liquid that has reached the scanning position is cured. do.

〔産業上の利用分野〕[Industrial application field]

本発明は、スタンパ−上に形成されたパターンを2P(
Photo Polymer)樹脂(紫外線硬化樹脂)
を利用して転写することで量産が行なわれる光ディスク
の製造方法、特に紫外線硬化処理前の2P樹脂膜の形成
方法に関する。
The present invention allows the pattern formed on the stamper to be 2P (
Photo Polymer) resin (ultraviolet curing resin)
The present invention relates to a method for manufacturing optical discs that can be mass-produced by transferring using a method, and particularly to a method for forming a 2P resin film before ultraviolet curing treatment.

〔従来の技術〕[Conventional technology]

第5図は従来の2P樹脂膜の形成方法を工程順に示す図
である。まず■に示すように、予め案内溝が形成された
スタンパ−(原盤)1上に、デイスペンサー2で2P樹
脂液3を滴下する。
FIG. 5 is a diagram showing a conventional method for forming a 2P resin film in order of steps. First, as shown in (2), a 2P resin liquid 3 is dropped by a dispenser 2 onto a stamper (master) 1 in which guide grooves have been formed in advance.

次に■のように、ガラス基板4を重ねて、スタンパ−1
との間に2P樹脂液3を挟み、■のように膜状に拡散さ
せる。このとき、スタンパ−1の案内溝が2P樹脂膜5
に転写される。このように2P樹脂膜5が形成された状
態で、ガラス基板4の上から紫外線を全面照射し、紫外
線硬化させた後、■に示すようにスタンパ−1からガラ
ス基板4を剥離すると、2P樹脂膜5に案内溝が転写さ
れた光ディスクが得られる。
Next, as shown in ■, stack the glass substrates 4 and stamper 1.
The 2P resin liquid 3 is sandwiched between the two and diffused into a film as shown in (2). At this time, the guide groove of the stamper 1 is aligned with the 2P resin film 5.
transcribed into. With the 2P resin film 5 formed in this way, the entire surface of the glass substrate 4 is irradiated with ultraviolet rays to cure the glass substrate 4, and then the glass substrate 4 is peeled off from the stamper 1 as shown in (). An optical disc with guide grooves transferred to the film 5 is obtained.

〔発明が解決しようとする課題] 第6図は、第5図の■の工程で2P樹脂液を拡散させた
状態を示す平面図である。3は、スタンパ−1上にリン
グ状に滴下された2P樹脂濯であり、上からガラス基板
4を重ねると、毛細管現象で2P樹脂液が拡散する。斜
線で示す領域5が、拡散した状態であるが、スタンパ−
1伯やガラス基板の面が完全に平坦化されていないため
、2P樹脂戚の拡がり方が一様でなく、外周部では、5
aで示すようにガラス基板4からはみ出したり、5bで
示すようにガラス基板4の外周まで到達しない領域が発
生する。
[Problems to be Solved by the Invention] FIG. 6 is a plan view showing the state in which the 2P resin liquid is diffused in the step (■) in FIG. 5. 3 is a 2P resin solution dropped in a ring shape onto the stamper 1, and when a glass substrate 4 is placed on top of the stamper 1, the 2P resin solution is diffused by capillary action. The area 5 indicated by diagonal lines is in a diffused state, but the stamper
Since the surface of the glass substrate is not completely flattened, the spread of the 2P resin is not uniform, and the outer periphery has 5
As shown by a, a region protrudes from the glass substrate 4, or a region does not reach the outer periphery of the glass substrate 4, as shown by 5b.

5aのようにガラス基板4の外周からはみ出した部分は
、パリとなる。また5bのように外J、YJまで到達し
ない領域は、案内溝を転写できないため、案内溝の欠落
した光ディスクとなり、不良品として廃棄しなければな
らない。
A portion like 5a that protrudes from the outer periphery of the glass substrate 4 becomes a blank. Furthermore, in areas such as 5b that do not reach the outer J and YJ areas, the guide grooves cannot be transferred, resulting in an optical disc with missing guide grooves, which must be discarded as a defective product.

また内周側においても、均一に拡散しないために、2P
樹脂1115の内周の径が一定とならない。しかしなが
ら、通常光ディスクの内周部8は、光ディスクを駆動す
る際のクランプ領域となるため、案内溝を要しないので
、外周側はど2P樹脂膜の径を揃える必要はない。
Also, on the inner circumferential side, 2P
The diameter of the inner circumference of the resin 1115 is not constant. However, since the inner peripheral part 8 of the optical disc normally serves as a clamping area when driving the optical disc and does not require a guide groove, there is no need to make the diameter of the 2P resin film the same on the outer peripheral side.

そこで、スタンパ−1の外周部に、2P樹脂液の拡がり
をせき止める遮蔽物を設けたりしているが、転写作業の
都度、遮蔽物の表面を清掃しなければならず、またその
際にスタンパ−のパターンが汚染され、次のパターン転
写に支障を来す。
Therefore, a shield is provided around the outer periphery of the stamper 1 to prevent the spread of the 2P resin liquid, but the surface of the shield must be cleaned every time a transfer operation is performed, and at that time, the stamper pattern is contaminated, causing trouble in the next pattern transfer.

外周部における2P樹脂液の拡がり不足をなくすために
、2P樹脂液を多めに滴下すると、パリの発生は避けら
れず、紫外線硬化処理の後に、ハリを除去しなければな
らないが、その際に塵埃が発生する。
If a large amount of 2P resin liquid is dropped in order to eliminate the insufficient spread of the 2P resin liquid on the outer periphery, the generation of flakes is unavoidable, and the firmness must be removed after UV curing treatment, but at that time dust occurs.

本発明の技術的課題は、このような問題に着目し、スタ
ンパ−とガラス基板との間に2P樹脂液を拡散する際に
、2P樹脂膜が一定の径となるような製造方法を実現す
ることにある。
The technical problem of the present invention is to focus on such problems and realize a manufacturing method in which the 2P resin film has a constant diameter when the 2P resin liquid is diffused between the stamper and the glass substrate. There is a particular thing.

(課題を解決するための手段〕 第1図は本発明による光ディスクの製造方法の基本原理
を説明する新開図であり、スタンパ−1の上に2P樹脂
液を滴下し、その上に透明基板4を重ねて、2P樹脂液
を拡散させている途中の状態を示している。5cは、未
硬化状態の2P樹脂膜である。
(Means for Solving the Problems) FIG. 1 is a new diagram illustrating the basic principle of the method for manufacturing an optical disc according to the present invention, in which a 2P resin liquid is dropped onto a stamper 1, and a transparent substrate 4 is placed on top of the stamper 1. 5c is a 2P resin film in an uncured state.

6.7は紫外線のビームであり、外側の紫外線ビーム6
は、2P樹脂膜の外径位置に照射され、内側の紫外線ビ
ーム7は、2P樹脂膜の内径位置に11%射される。そ
して、スタンパ−1の中心Cの回りに、スタンパ−1ま
たは紫外線ビーム6.7を回転させ、ガラス基板4の上
から、2P樹脂膜の外径位置および内径位置において、
紫外線ビームを走査する。6g、7gは、紫外線ビーム
のガイドである。
6.7 is the ultraviolet beam, and the outer ultraviolet beam 6
is applied to the outer diameter position of the 2P resin film, and 11% of the inner ultraviolet beam 7 is applied to the inner diameter position of the 2P resin film. Then, the stamper 1 or the ultraviolet beam 6.7 is rotated around the center C of the stamper 1, and the stamper 1 or the ultraviolet beam 6.7 is rotated from above the glass substrate 4 at the outer and inner diameter positions of the 2P resin film.
Scanning the ultraviolet beam. 6g and 7g are guides for the ultraviolet beam.

なお、内周側の紫外線ビーム7の1)り(射は省いても
よい。
Incidentally, the irradiation (1) of the ultraviolet beam 7 on the inner peripheral side may be omitted.

〔作用〕[Effect]

第21d (a) (b)は本発明の作用を説明する平
面図である。いま、透明基板4の上から、第2図の6、
7の位置に紫外線ビームを照射し、スクンバー1を回転
させると、外径Roと内径Riの位置で紫外線ビームが
走査される。そのため、未硬化の21〕樹脂液5Cが拡
散し、(a)に示すように紫外線ビームの走査位置に到
達すると、その位置で硬化し、それ以上拡散しない。そ
して、5bで示すように、外径R。
21d (a) and 21d (b) are plan views illustrating the operation of the present invention. Now, from above the transparent substrate 4, 6 in FIG.
When the ultraviolet beam is irradiated to the position 7 and the scrubber 1 is rotated, the ultraviolet beam is scanned at the positions of the outer diameter Ro and the inner diameter Ri. Therefore, the uncured 21] resin liquid 5C diffuses, and when it reaches the scanning position of the ultraviolet beam as shown in (a), it hardens at that position and does not diffuse any further. And, as shown by 5b, the outer diameter R.

の位置に到達してない部分は、2P樹脂が硬化していな
いため、引続いて外径Roの位置まで拡散し、紫外線ビ
ームが照射されて硬化する。その結果、最終的には、(
b)に示すように、全周にわたって外径Roの位置で、
2P樹脂液の拡散で止まり、2P樹脂1模の外周が真円
となる。
Since the 2P resin has not yet been cured in the portion that has not reached the position, the resin continues to diffuse to the position of the outer diameter Ro, and is irradiated with the ultraviolet beam and cured. As a result, in the end, (
As shown in b), at the position of the outer diameter Ro over the entire circumference,
The diffusion of the 2P resin liquid stops, and the outer circumference of the 2P resin model becomes a perfect circle.

内周側も全く同様に、内径位置R4で紫外線ビームが走
査されるため、(a)に示すように、2P樹脂液が内径
位置1?iに到達すると紫外線硬化し、最終的には(b
)に示すように、内径Riが真因となる。
Similarly, on the inner circumferential side, the ultraviolet beam is scanned at the inner diameter position R4, so as shown in (a), the 2P resin liquid is at the inner diameter position 1? When it reaches i, it is cured by ultraviolet light, and finally (b
), the inner diameter Ri is the real cause.

〔実施例〕〔Example〕

次に本発す1による光ディスクの製造方法が実際上どの
ように具体化されるかを実施例で説明する。
Next, how the method for manufacturing an optical disc according to 1 of the present invention is actually implemented will be explained using an example.

第3図は本発明による2+)樹脂膜の形成方法の実施例
を工程順に示す図である。
FIG. 3 is a diagram showing, in order of steps, an embodiment of the method for forming a 2+) resin film according to the present invention.

ますのに示すように、予め案内溝が形成されたスタンパ
−(原盤)1上に、デイスペンサー2で21)樹脂3を
滴下する。このとき、スタンパ−1を1回転させながら
、2P樹脂液を滴下することで、リング状に塗布する。
As shown in the figure, 21) resin 3 is dropped using a dispenser 2 onto a stamper (master) 1 on which guide grooves have been formed in advance. At this time, the 2P resin liquid is applied dropwise while rotating the stamper 1 in a ring shape.

次に■のように、ガラス基板4を重ねて、スタンパ−1
との間に2P樹脂3を挟み、■のように膜状に拡散させ
る。このとき、光ガイド6g、7gを、2P樹脂膜の外
径Roおよび内径Riに位置決めし、ビーム径が0 、
5mm程度の紫外線ビーム6.7を照射するとともに、
スタンパ−1を回転さセる。これによって、ガラス基板
4の内外周が、一定の径の位置で円周方向にビーム走査
される。
Next, as shown in ■, stack the glass substrates 4 and stamper 1.
2P resin 3 is sandwiched between the two and diffused into a film as shown in (2). At this time, the light guides 6g and 7g are positioned at the outer diameter Ro and inner diameter Ri of the 2P resin film, and the beam diameter is 0,
In addition to irradiating the ultraviolet beam 6.7 with a diameter of about 5 mm,
Rotate stamper 1. As a result, the inner and outer peripheries of the glass substrate 4 are scanned with a beam in the circumferential direction at positions with a constant diameter.

第2図で説I91シたように、2P樹脂液が外径ROお
よび内径Riまで拡がると、紫外線ビームで硬化し、2
P樹脂膜5の外径および内径が真円となる。
As shown in theory I91 in Fig. 2, when the 2P resin liquid spreads to the outer diameter RO and inner diameter Ri, it is cured by the ultraviolet beam and the 2P resin liquid is
The outer diameter and inner diameter of the P resin film 5 become a perfect circle.

また、その結果、スタンパ−1の全案内溝が2P樹脂膜
5に転写される。このように2P樹脂膜5が形成された
状態で、■に示すように、光源りでガラス基+fi 4
の上から紫外線を全面照射し、2P樹脂膜5の全面を紫
外線硬化させた後、■に示すようにスタンパ−1からガ
ラス基板4を剥離すると、2P樹脂膜5に案内溝が転写
された光ディスクが得られる。
Moreover, as a result, all the guide grooves of the stamper 1 are transferred to the 2P resin film 5. With the 2P resin film 5 formed in this way, as shown in (■), the glass base + fi 4 is
After irradiating the entire surface of the 2P resin film 5 with ultraviolet rays and curing the entire surface of the 2P resin film 5 with UV rays, the glass substrate 4 is peeled off from the stamper 1 as shown in (2), and an optical disc with guide grooves transferred to the 2P resin film 5 is obtained. is obtained.

この実施例では、光ガイド6g、7gを外径Roおよび
内径Riの位置で固定しているが、スタンパ−1の中心
Cの回りに、光ガイド6g、 7gを回転させてもよい
。またスタンパ−1と光ガイド6g、7gを逆向きに回
転させてもよい。
In this embodiment, the light guides 6g, 7g are fixed at the positions of the outer diameter Ro and the inner diameter Ri, but the light guides 6g, 7g may be rotated around the center C of the stamper 1. Alternatively, the stamper 1 and the light guides 6g, 7g may be rotated in opposite directions.

紫外線ビーム6.7の照射角度は、必ずしもガラス基板
4に対し直角である必要はない。また、光ディスクの内
周側は、クランプ領域8となるため、2P樹脂膜の内周
は正確な真円にする必要性はないので、内周側は必ずし
も紫外線ビームを照射する必要はない。
The irradiation angle of the ultraviolet beam 6.7 does not necessarily have to be perpendicular to the glass substrate 4. Further, since the inner circumferential side of the optical disc becomes the clamp area 8, there is no need for the inner circumference of the 2P resin film to be an accurate perfect circle, so it is not necessarily necessary to irradiate the inner circumferential side with the ultraviolet beam.

以上のように、スタンパ−1の内外周において、紫外線
ビームで硬化させることで、2P樹脂膜を真円に形成で
きるが、2P樹脂液をより均等に拡げるためには、スタ
ンパ−1上への2P樹脂の滴下方法も関係する。すなわ
ち、2P樹脂液を、スタンパ−1上の一点に滴下しただ
けでは、全面に均等に拡散できない。
As described above, a 2P resin film can be formed into a perfect circle by curing with an ultraviolet beam on the inner and outer peripheries of the stamper 1. However, in order to spread the 2P resin liquid more evenly, it is necessary to The method of dropping the 2P resin is also relevant. That is, if the 2P resin liquid is simply dropped at one point on the stamper 1, it cannot be uniformly spread over the entire surface.

そこで本発明では、デイスペンサー2を用いて2P樹脂
液を滴下させる際に、第4図に示すように、スタンパ−
1上で一周させることにより、リング状に2P樹脂液を
滴下させている。このようなリング状2P樹脂液3の上
にガラス基板を載せると、2P樹脂液が外周側および内
周側に拡がるため、全面に均一に拡散する。
Therefore, in the present invention, when dropping the 2P resin liquid using the dispenser 2, as shown in FIG.
1, the 2P resin liquid is dropped in a ring shape. When a glass substrate is placed on such a ring-shaped 2P resin liquid 3, the 2P resin liquid spreads to the outer circumferential side and the inner circumferential side, so that it is uniformly diffused over the entire surface.

またリング状の2P樹脂液3は、丁度−周させるのでは
なく、2P樹脂液3の塗布開始点31と塗布終端32と
がつながらないように、−周直前の位置で塗布を止める
Further, the ring-shaped 2P resin liquid 3 is not applied exactly around the -turn, but is stopped at a position just before the -turn so that the application start point 31 and the application end 32 of the 2P resin liquid 3 are not connected.

2P樹脂液3の塗布開始点31は、蛇の頭のように膨ら
み、その位置のみ2P樹脂液が過剰となるが、2P樹脂
液3の塗布開始点31と塗布終端32とがつながらない
ように間隔Gをあけておくと、ガラス基板を載せて拡散
を始めた際に、破線で示すように、間隔Gの領域に、塗
布開始点31の余剰の2P樹脂液が拡がる。そして、塗
布終端32とつながった際に、表面張力で、鎖線で示す
ように、一定幅の2P樹脂液のリングとなる。その結果
、全周にわたって2P樹脂液の量が均一となり、全面に
一様に2P樹脂液が拡散できる。
The application start point 31 of the 2P resin liquid 3 swells like a snake's head, and there is an excess of 2P resin only at that position, but the interval is set so that the application start point 31 of the 2P resin liquid 3 and the application end 32 do not connect. If G is left open, when the glass substrate is placed and diffusion begins, the excess 2P resin liquid at the coating start point 31 will spread in the area of the gap G, as shown by the broken line. When connected to the coating end 32, the surface tension forms a ring of 2P resin liquid with a constant width, as shown by the chain line. As a result, the amount of the 2P resin liquid becomes uniform over the entire circumference, and the 2P resin liquid can be uniformly spread over the entire surface.

〔発明の効果〕〔Effect of the invention〕

以上のように本発明によれば、スタンパ−と透明基板と
の間で2P樹脂液を膜状に拡散させる際に、2P樹脂膜
の少なくとも外周位置に、ビーム状に絞った紫外線を照
射し、円周方向に走査することで、該走査位置に到達し
た2P樹脂液を硬化させる方法を採っている。そのため
、2P樹脂液が該走査位置で硬化して、それ以上拡がる
ことができず、真円の2P樹脂膜を形成することができ
、従来のようにパリが発生したり、案内溝が欠落したり
することはない。しかも、2P樹脂液をせき止める遮蔽
物を設けたりする必要もないので、作業が簡便で、品質
が低下するなどの恐れもない。
As described above, according to the present invention, when the 2P resin liquid is diffused into a film between the stamper and the transparent substrate, at least the outer peripheral position of the 2P resin film is irradiated with ultraviolet rays focused in a beam shape, A method is adopted in which the 2P resin liquid that reaches the scanning position is cured by scanning in the circumferential direction. Therefore, the 2P resin liquid hardens at the scanning position and cannot spread any further, making it possible to form a perfectly circular 2P resin film, which eliminates the occurrence of cracks and missing guide grooves as in conventional methods. There is no need to worry. Moreover, since there is no need to provide a shield to block the 2P resin liquid, the work is simple and there is no risk of quality deterioration.

【図面の簡単な説明】 第1図は本発明による光ディスクの製造方法の基本原理
を説明する断面図、 第2図は本発明方法の作用を説明する平面図、第3図は
本発明方法の実施例を工程順に示す図、第4図は2P樹
脂液の滴下方法を示す平面図、第5図は従来の光ディス
クの製造方法を工程順に示す側面図、 第6図は同方法において拡散が行なわれた2P樹脂膜を
示す平面図である。 図において、lはスタンパ−3は滴下された2P樹脂液
、4は透明基板(ガラス基板)、5は硬化した2P樹脂
膜、5aは2P樹脂のパリ、5bは2P樹脂の不足部、
5cは硬化前の2P樹脂膜、6は外周位置の紫外線ビー
ム、7は内周位置の紫外線ビームをそれぞれ示す。
[Brief Description of the Drawings] Fig. 1 is a cross-sectional view explaining the basic principle of the optical disc manufacturing method according to the present invention, Fig. 2 is a plan view explaining the operation of the method of the present invention, and Fig. 3 is a cross-sectional view explaining the basic principle of the method of manufacturing an optical disc according to the present invention. Figure 4 is a plan view showing the method of dropping the 2P resin liquid; Figure 5 is a side view showing the conventional method for manufacturing an optical disk in the order of steps; Figure 6 is a diagram showing the process in which diffusion is performed in the same method. FIG. 2 is a plan view showing a 2P resin film. In the figure, l is the stamper 3, the dropped 2P resin liquid, 4 is the transparent substrate (glass substrate), 5 is the cured 2P resin film, 5a is the 2P resin pad, 5b is the missing part of the 2P resin,
5c shows the 2P resin film before curing, 6 shows the ultraviolet beam at the outer circumferential position, and 7 shows the ultraviolet beam at the inner circumferential position.

Claims (1)

【特許請求の範囲】 スタンパーと透明基板との間に2P樹脂液を挟んで膜状
に拡散させた状態で紫外線を照射し、スタンパーパター
ンが転写された2P樹脂膜を硬化させた後、スタンパー
から剥離する方法において、スタンパー(1)と透明基
板(4)との間で2P樹脂液(5c)を膜状に拡散させ
る際に、 2P樹脂膜の外周位置および内周位置のうち、少なくと
も外周位置に、ビーム状に絞った紫外線(6)を照射し
、 かつ、該ビーム状紫外線(6)およびスタンパー(1)
を相対的に回転させることで、ビーム状紫外線を同一円
周上で走査し、 該走査位置に到達した2P樹脂液(5c)を硬化させる
ことを特徴とする光ディスクの製造方法。
[Claims] After the 2P resin liquid is sandwiched between the stamper and the transparent substrate and diffused into a film, ultraviolet rays are irradiated to cure the 2P resin film with the stamper pattern transferred thereto. In the peeling method, when the 2P resin liquid (5c) is diffused into a film between the stamper (1) and the transparent substrate (4), at least the outer peripheral position of the outer peripheral position and the inner peripheral position of the 2P resin film is is irradiated with ultraviolet rays (6) focused in a beam shape, and the beam-shaped ultraviolet rays (6) and the stamper (1)
A method for manufacturing an optical disc, comprising: scanning a beam-like ultraviolet ray on the same circumference by rotating the 2P resin liquid (5c) relative to each other; and curing the 2P resin liquid (5c) that reaches the scanning position.
JP1312645A 1989-11-30 1989-11-30 Production of optical disk Pending JPH03173954A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1312645A JPH03173954A (en) 1989-11-30 1989-11-30 Production of optical disk

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1312645A JPH03173954A (en) 1989-11-30 1989-11-30 Production of optical disk

Publications (1)

Publication Number Publication Date
JPH03173954A true JPH03173954A (en) 1991-07-29

Family

ID=18031704

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1312645A Pending JPH03173954A (en) 1989-11-30 1989-11-30 Production of optical disk

Country Status (1)

Country Link
JP (1) JPH03173954A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7226637B2 (en) * 2000-01-18 2007-06-05 D Data Inc. Manufacturing method for multilayer fluorescent information carriers
WO2007091524A1 (en) * 2006-02-07 2007-08-16 Origin Electric Company, Limited Apparatus, method and program for forming resin film
JP2020107863A (en) * 2018-12-28 2020-07-09 キヤノン株式会社 Film formation device and production method of article

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7226637B2 (en) * 2000-01-18 2007-06-05 D Data Inc. Manufacturing method for multilayer fluorescent information carriers
WO2007091524A1 (en) * 2006-02-07 2007-08-16 Origin Electric Company, Limited Apparatus, method and program for forming resin film
JP2007209839A (en) * 2006-02-07 2007-08-23 Origin Electric Co Ltd Resin film forming apparatus, resin forming method and program
JP2020107863A (en) * 2018-12-28 2020-07-09 キヤノン株式会社 Film formation device and production method of article

Similar Documents

Publication Publication Date Title
JPH04161305A (en) Manufacture of lens and its manufacturing device
JPH02126434A (en) Optical disk substrate molding method
JPH0313902A (en) Compound optical parts and production thereof
JPH03173954A (en) Production of optical disk
JPH04370548A (en) Production of base body for optical recording disk and device for executing this method
JPS5836417A (en) Manufacture of information carrier
JPS59111820A (en) Manufacture of optical information carrier disc
JPH02258318A (en) Manufacture of optical disk base
JPH01264644A (en) Production of optical disk substrate
JPS62266749A (en) Production of optical disk
JP3049862B2 (en) Manufacturing method of information recording disk
JPH04123002A (en) Production of lens array and apparatus for producing this lens array
JP2757520B2 (en) Optical disc manufacturing method
JPH03178409A (en) Manufacture of disc
JPH04255927A (en) Optical recording disk and its manufacture
JPH0630181B2 (en) Method for manufacturing substrate of optical recording medium
JPS6391846A (en) Production of information recording disk
JPS63234428A (en) Production of optical disk
JPS63281243A (en) Production of substrate for optical recording medium
JP2632062B2 (en) Optical disc manufacturing method
JPS63307909A (en) Preparation of resin disc
JPH10302317A (en) Optical stuck disk and its production
JPH0675875B2 (en) Method and apparatus for manufacturing composite optical element
JPS62293533A (en) Manufacture of optical disk
JPH04159632A (en) Optical disk substrate