JPH0317343B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a line-shaped electron beam generator suitable for use in an electron beam annealing device or the like.

[Prior Art] FIG. 4 shows a conventional line-shaped electron beam generating section, in which reference numeral 1 is a cathode having an elongated electron beam generating section 2. A heating current is supplied to the cathode 1 from a power source 3, and as a result, thermoelectrons are generated from the cathode. The thermoelectrons are controlled by a control electrode 4 disposed close to the cathode 1, accelerated by the anode 5, and irradiated onto a material to be heated (not shown).

[Problems to be Solved by the Invention] In the above-described configuration, since the current i is passed through the electron beam generating section 2 of the cathode 1, there is a
A magnetic field H is formed in a direction perpendicular to the plane of the paper. As a result, the electron beam generated from the cathode 1 is deflected by the magnetic field and is irradiated in a direction offset from the optical axis O.

The present invention has been made in view of the above points, and
It is an object of the present invention to provide an electron beam generator that can accurately irradiate an electron beam in the optical axis direction.

[Means for Solving the Problems] A linear electron beam generating device based on the present invention includes a cathode having an elongated electron beam generating section, a means for supplying a heating current to the cathode, and an electron beam generator generated from the cathode. In an apparatus comprising a control electrode for controlling a line beam and a cathode for accelerating the electron beam, means is provided for moving the anode from outside the lens barrel with respect to the cathode on a plane perpendicular to the optical axis. It is characterized by

[Example] Hereinafter, an example of the present invention will be described in detail based on the accompanying drawings.

In FIG. 2, the same components as those in FIG. 1 are given the same numbers and detailed explanation thereof will be omitted.
In this embodiment, the anode 5 is arranged so as to be movable by a moving mechanism 6 in the X and Y2 directions perpendicular to the optical axis O. FIG. 2 shows the relationship between the electron beam generating section 2 of the cathode 1 and the aperture 5a of the anode 5. The width and flow of the opening 5a are made longer than those of the generation section 2, and the anode 5 is made movable by the moving mechanism 6 by ±a in the X direction and ±b in the Y direction. There is. As mentioned above, by supplying the current i to the cathode, a magnetic field is formed below the cathode 1 to deflect the electron beam, and although the electron beam generated from the cathode 1 is deflected by the magnetic field, this In the embodiment, the deflection of the electron beam by the magnetic field is compensated for by the electrostatic deflection action of the anode 5. That is, the position of the anode is moved depending on the degree of deflection of the electron beam, and the electron beam is deflected by the electrostatic deflection field of the anode in a direction opposite to the direction of deflection by the magnetic field. Therefore, the electron beam is irradiated along the optical axis O.

[Effect] As detailed above, in the present invention, it is possible to compensate for the deflection of the electron beam due to the magnetic field caused by the length of the current in the elongated electron beam generating section, and to direct the linear electron beam to the target area. It becomes possible to irradiate accurately. Furthermore, in the present invention, the deflection of the electron beam due to the magnetic field generated based on the supply of heating current to the cathode is compensated for by a mechanical mechanism that moves the anode relative to the cathode. Alternatively, there are various advantages over the case where an electric mechanism such as a deflection coil, a deflection electrode, or an electromagnet is provided directly under the anode. That is,
The electrical mechanism is affected by external noise,
The mechanical mechanism of the present invention is not affected by such external noise. The electrical mechanism described above requires extra space to provide a compensation mechanism between the control electrode and the anode or directly below the anode, but the mechanical mechanism of the present invention can drive the anode from outside the lens barrel. Since only a moving rod is provided inside the lens barrel that connects the drive mechanism outside the lens barrel and the anode inside the lens barrel, there is no space between the control electrode and the anode.
Alternatively, there is no need to provide a particularly large space directly under the anode.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing an embodiment of the present invention, FIG. 2 is a diagram showing the relationship between the anode and cathode electron beam generating parts of FIG. 1, and FIG. 3 is a diagram showing a conventional linear electron beam generator. FIG. 1... Cathode, 2... Electron beam generating section, 3...
Power source, 4...control electrode, 5...anode, 6...movement mechanism.

Claims (1)

[Claims] 1. Equipped with a cathode having an elongated electron beam generating section, means for supplying a heating current to the cathode, a control electrode for controlling the electron beam generated from the cathode, and an anode for accelerating the electron beam. 1. A line-shaped electron beam generating device, characterized in that a means for moving the anode from outside the lens barrel to the cathode on a plane perpendicular to the optical axis is provided.