JPH01231250A - Indirectly-heated linear filament type electron gun - Google Patents

Abstract

PURPOSE:To lengthen the form of an electron beam so that a stable and uniform electron beam can be obtained by generating a thermion from a linear filament heated indirectly and drawing out said thermion by an acceleration voltage applied to an anode. CONSTITUTION:A lengthy linear filament 13, a lengthy bombardment filament 11 for heating the linear filament 13, and a support structure for supporting the linear filament 13 and the bombardment filament 11 are provided. A cooling chamber 50 for cooling the support structure, a lengthy anode 15 for drawing out the thermion generated from the linear filament 13 followed by acceleration, and a grid 14 for regulating the drawn amount of the thermion and converging said thermion are provided. Hence, an uniform and stable lengthy electron beam can be obtained without oscillating right and left.

Description

DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to an indirectly heated linear filament type electron gun used as a heat source for generating metal vapor, and is also applicable to vapor deposition equipment.

<Prior art> Fig. 2(al) shows a conventional indirectly heated electron gun. First, an example using a disc-shaped filament shown in Fig. 2(al) will be explained. , the bombarded filament 1 is heated by supplying direct current or alternating current from the power supply 7 to generate thermoelectrons, and an accelerating voltage is applied between the disc-shaped filament 3 and the bombarded filament 1 to generate the thermoelectrons. is applied to the disc-shaped filament 3 to indirectly heat it.Thermal electrons are generated from the heated disc-shaped filament 3, and these thermoelectrons are sent to the anode 5.
It is pulled out by the accelerating voltage, accelerated, and irradiated onto the target, heating it. Here, the grid 4 is used to control beam current and light focusing. Since the shape of the electron beam 6 obtained by such an electron gun is likely to be spot-like, the electron beam irradiation range 2 on the target is
It is circular like c.

Next, another electron gun shown in FIG. 2(b) will be explained. As shown in the figure, a spiral bombarded filament 1 is provided around the outer periphery of a rod-shaped filament 3, and the rod-shaped filament 3 is indirectly heated by a power source 8. The shape of the electron beam obtained by the electron gun B is also spot-like, so the electron beam irradiation range 2 on the target is circular.

<Problems to be Solved by the Invention> Since the shape of the electron beam 6 obtained by a conventional electron gun (both are spot-like), the electron beam irradiation area 2 on the Kuget (which is circular; that is, the shape of the electron beam 6 obtained by the conventional electron gun is Electron gun (
Due to its configuration, it was impossible to generate an elongated electron beam, so there is no problem when evaporating metal in a circular shape, but when evaporating metal in a long shape, needs to be oscillated.

However, since a stable output cannot be obtained when oscillating, it cannot be applied in cases where uniform vapor density is required.

The present invention provides an electron gun that can elongate the shape of the electron beam and obtain a stable and uniform electron beam over a wide range, thereby making it possible to perform metal evaporation efficiently and uniformly, significantly shortening the working time. The aim is to expand the application of electron guns by making it possible to apply them to the field of metal evaporation, which was not possible with conventional spot beams.

<Means for Solving the Problems> The indirectly heated linear filament type electron gun of the present invention achieves the above objects. A long linear filament, a long bombarded filament for heating the linear filament, a support structure for supporting the linear filament and the bombarded filament, and a cooling system for cooling the support structure. A chamber, a long anode for extracting and accelerating thermoelectrons generated from the linear filament, and a grid for adjusting the amount of extraction of the thermoelectrons and focusing them. .

Function: By applying electricity to the long bombarded filament and heating it, thermoelectrons are generated, which are brought into contact with the long linear filament to indirectly heat the linear filament. Thermionic electrons are generated from the heated linear filament, and these thermoelectrons are extracted by an accelerating voltage applied to the anode, and are accelerated into a linear electron beam.

A potential opposite to that of the anode is applied to the grid, and the electron beam output and light focusing properties are adjusted.

Embodiments Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 and FIG. 3 show an electron gun 41 according to an embodiment of the present invention.
shows. As shown in both figures, shelf portions 35a and 35b are provided inside the box-shaped casing 35 and protrude from the sides thereof, and these shelf portions 35a.

An insulator plate 30 is horizontally supported on 35b via a Q+J song. The area below the insulator plate 30 is a cooling chamber 50 into which cooling oil flows and is discharged, and is therefore sealed with an O-ring 9 to prevent oil from leaking. casing 35
Current introduction terminals 17 penetrate through the bottom surfaces of the respective electric current introduction terminals 17 via insulators 40, and these current introduction terminals 17 are connected to a bombarded filament power source (which may be AC or DC) 70. On the other hand, two support structure members 60 penetrate through the insulator board 30, and each support structure member 60 is rod-shaped, and the current introduction terminal 17 is passed through the lead gland 16.
is connected to. A bombard filament fixing part 12 is provided at the upper end of each support structure member 60, and a long bombard filament 11 is horizontally supported between these bombard filament fixing parts 12.

A long linear filament 13 is supported horizontally on If of the bombarded filament 11. Bombard filament 11. All linear filaments 13 are rod-shaped filaments. The linear filament 13 is inserted into the insulator 2 at the slit-shaped opening of the grid 14 provided as the top cover of the casing 35.
0. It is suspended via a filament fixing part 25. The linear filament 13 is connected via a lead wire 16 to an introduction terminal 21 passing through an insulator plate 30, and further connected via a lead wire 16 to an introduction terminal 22 passing through the bottom of the caning via an insulator 40. connected between the bombarded power source 80 and the grid power source 90, the grid 14. It has a higher potential than the bombarded filament 11.

Furthermore, grid 14. An anode 15 having a slit-shaped opening is supported directly above the linear filament 13 . A more positive potential than that of the linear filament 13 is applied to the anode 15 by the acceleration power supply 100 . Since a negative potential is applied to the grid 14 by the grid power supply 90 compared to the linear filament 13,
An opposite potential is applied to the grid 14 compared to the anode 15. The anode 15 is cooled by supplying and discharging the cooling water 10.

The electron gun 41 of this embodiment having the above configuration is used as follows.

First, direct current or alternating current is applied from the bombarded filament power supply 70 to the current introduction terminal 17° lead wire 16. It is supplied to the long bombarded filament 11 via the support structure material 60.

Each current introduction terminal 12. An insulator 40 is placed between the filament support structural members 60. Since the insulator plate 30 is interposed, there will be no short circuit. The bombarded filament 11 to which the current is supplied is resistively heated to about 2,700 ℃ and generates thermoelectrons. Linear filament 13 is bombarded power supply 8
Since a high potential is applied due to 0, the above electrons collide,
Therefore, it will be heated. The heated linear filament 13 will generate thermoelectrons. The heat generated due to this is removed by supplying and discharging the cooling oil 18 to the cooling chamber 50.

On the other hand, when a positive potential is applied to the anode 15 by the accelerating power source 100, the thermoelectrons generated from the linear filament 13 are extracted and accelerated to become a long electron beam 6. At this time, if the potential of the grid 14 is adjusted by the grid power supply 90, the linear filament 1
3, it is possible to adjust the amount of thermoelectrons generated and control the light gathering ability. In addition, the anode 15 is cooled using cooling water 1.
This is done by supplying and discharging 0.

In this way, the electron gun 41 of this embodiment has a long electron beam 6.
Therefore, the range irradiated with the electron beam 6 is not circular (it is elongated). Therefore, if the electron gun of the present invention is used, it is possible to emit long metal vapor, which was previously impossible. For example, as shown in FIG. 4, the electron beam 6 emitted from the electron gun 41 is deflected by the magnetic field 451c generated by the magnetic field generator 44. 90 degree bend po4
The metal vapor 46 may be generated by irradiating the target 43 inside the metal vapor 2 . In this way, the electron beam 6 is focused on the target 42 by the focusing effect of the polarized light, so that metal vapor can be generated efficiently.

:Effects of the Invention> As described above in detail based on the embodiments, the electron gun of the present invention can generate an elongated electron beam rather than a spot-like electron beam.

For this reason, metal evaporation can be carried out efficiently using a uniform and stable elongated electron beam without oscillating the electron beam from side to side.
This allows the process to be carried out uniformly, thus making it possible to significantly shorten the working time. In other words, it becomes possible to apply the present invention to fields such as metal evaporation that require elongated electron beam irradiation.

[Brief explanation of the drawing]

Fig. 1 is a block diagram of an indirectly heated linear filament type electron gun according to an embodiment of the present invention, Fig. 2 is a block diagram of a conventional electron gun, and Fig. 3 is a block diagram of an indirectly heated linear filament type electron gun according to an embodiment of the present invention. FIG. 4 is an explanatory diagram showing a specific application example of the electron gun of the present invention. In the drawing, 1 is the bombard filament, 2 is the electron beam irradiation range, 3 is the filament, 4 is the grid, 5 is the anode, 6 is the electron beam, 7 is the bombard filament power supply, 8 is the bombard power supply, 9 is 0 Ring, 10 is cooling water, 11 is bombard filament, 12 is fixed part, 13 is linear filament 1, 14 is green node, 15 is an anode, 16 is lead wire, 17 is current introduction terminal, 18 is cooling oil, 20 is Insulator, 21, 22 is the introduction terminal, 25 is the filament fixing part, 30 is the insulator board, 35 is the casing, 40 is the insulator, 41 is the electron gun, 42 is the crucible, 43 (Yotagerato, 44 is A deflection magnetic field generator, 45 a magnetic field, 46 a metal vapor, 50 a cooling chamber, 60 a support structure, 70 a bombarded filament power source, 80 a bombarded power source, 90 a grid power source, and 100 an acceleration power source. Patent applicant Mitsubishi Heavy Industries, Ltd. JEOL Ltd. Agent

Claims (1)

[Claims] An electron gun for obtaining a long linear electron beam used in a metal evaporation device includes a long linear filament, a long bombarded filament that heats the linear filament, and a long linear filament and a long bombarded filament. A support structure for supporting, a cooling chamber for cooling the support structure, a long anode for extracting and accelerating thermoelectrons generated from the linear filament, and adjusting the amount of extraction of the thermoelectrons. , and a grid for focusing the light.