JPS56109442A - Electron beam generator - Google Patents

Electron beam generator

Info

Publication number
JPS56109442A
JPS56109442A JP1273980A JP1273980A JPS56109442A JP S56109442 A JPS56109442 A JP S56109442A JP 1273980 A JP1273980 A JP 1273980A JP 1273980 A JP1273980 A JP 1273980A JP S56109442 A JPS56109442 A JP S56109442A
Authority
JP
Japan
Prior art keywords
filament
lens
electron beam
electron gun
correction coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1273980A
Other languages
Japanese (ja)
Inventor
Seiichi Tsukamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP1273980A priority Critical patent/JPS56109442A/en
Publication of JPS56109442A publication Critical patent/JPS56109442A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To simplify the structure by providing a correction coil for supplying a flux having same amount and opposite polarity with that produced by the heating current for filament between an electron gun and a lens firing the filament with A.C. CONSTITUTION:An electron beam welder has an electron gun chamber 20 and an electromagnetic lens 5, where the welding is performed by irradiating the electron beam 101 onto an object 30. Correction coils 73, 73' are provided between the electron gun 20 and the lens 5 while the current in the filament 1 is detected by a current transformer 71, and the correction coil 73' is driven by an amplifier 72 to produce a field having opposite polarity and same amount with that produced from the filament 1 while the correction coil 73 is driven to align the axis of the beam 101 with the center of the lens 5. Consequently the beam will never vibrate even if the filament 1 is fired with A.C. and the rectifier in the power source can be eliminated to simplify the structure.
JP1273980A 1980-02-05 1980-02-05 Electron beam generator Pending JPS56109442A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1273980A JPS56109442A (en) 1980-02-05 1980-02-05 Electron beam generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1273980A JPS56109442A (en) 1980-02-05 1980-02-05 Electron beam generator

Publications (1)

Publication Number Publication Date
JPS56109442A true JPS56109442A (en) 1981-08-29

Family

ID=11813790

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1273980A Pending JPS56109442A (en) 1980-02-05 1980-02-05 Electron beam generator

Country Status (1)

Country Link
JP (1) JPS56109442A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6199255A (en) * 1984-10-19 1986-05-17 Jeol Ltd Line-form electron beam generator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6199255A (en) * 1984-10-19 1986-05-17 Jeol Ltd Line-form electron beam generator
JPH0317343B2 (en) * 1984-10-19 1991-03-07 Nippon Electron Optics Lab

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