JPH0316612U - - Google Patents

Info

Publication number
JPH0316612U
JPH0316612U JP7815989U JP7815989U JPH0316612U JP H0316612 U JPH0316612 U JP H0316612U JP 7815989 U JP7815989 U JP 7815989U JP 7815989 U JP7815989 U JP 7815989U JP H0316612 U JPH0316612 U JP H0316612U
Authority
JP
Japan
Prior art keywords
film forming
substrate
thin film
nozzle
discharge port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7815989U
Other languages
English (en)
Other versions
JPH0745846Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989078159U priority Critical patent/JPH0745846Y2/ja
Publication of JPH0316612U publication Critical patent/JPH0316612U/ja
Application granted granted Critical
Publication of JPH0745846Y2 publication Critical patent/JPH0745846Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Non-Insulated Conductors (AREA)
  • Manufacturing Of Electric Cables (AREA)

Description

【図面の簡単な説明】
第１図は、本考案の実施例を示す霧化薄膜形成
装置の概略縦断側面図、第２図は、第１図のＡ−
Ａ線断面図、第３図〜第５図は、他の実施例を示
す霧化薄膜形成装置の概略縦断側面図、第６図は
、従来例を示す霧化薄膜形成装置の概略縦断側面
図、第７図は、第６図で示した装置における基板
の成膜室での位置と成膜速度との関係の概略を示
すグラフである。 １…霧化器、３…成膜用ノズル、３ａ…成膜用
ノズルの吐出口、４…成膜室、７…均熱板、８…
ヒータ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 薄膜の原料溶液を霧化する霧化器１と、原料溶
    液の霧の吐出口３ａを上方に向けて開口させた成
    膜用ノズル３と、同成膜用ノズル３の吐出口３ａ
    の上を通過するよう一方向に搬送される基板６を
    天面とする成膜室４と、成膜室４にある上記基板
    ６を加熱する手段とからなる霧化薄膜形成装置に
    おいて、霧化器１に接続された成膜用ノズル３を
    各々有する成膜室４が、上記基板６が搬送される
    方向に複数連ねて配置されていることを特徴とす
    る霧化薄膜形成装置。
JP1989078159U 1989-06-30 1989-06-30 霧化薄膜形成装置 Expired - Lifetime JPH0745846Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989078159U JPH0745846Y2 (ja) 1989-06-30 1989-06-30 霧化薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989078159U JPH0745846Y2 (ja) 1989-06-30 1989-06-30 霧化薄膜形成装置

Publications (2)

Publication Number Publication Date
JPH0316612U true JPH0316612U (ja) 1991-02-19
JPH0745846Y2 JPH0745846Y2 (ja) 1995-10-18

Family

ID=31621182

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989078159U Expired - Lifetime JPH0745846Y2 (ja) 1989-06-30 1989-06-30 霧化薄膜形成装置

Country Status (1)

Country Link
JP (1) JPH0745846Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7067337B2 (en) 1996-05-15 2006-06-27 Seiko Epson Corporation Thin film device provided with coating film, liquid crystal panel and electronic device, and method for making the thin film device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6169961A (ja) * 1984-09-13 1986-04-10 Agency Of Ind Science & Technol 霧化薄膜作製装置用ノズル

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6169961A (ja) * 1984-09-13 1986-04-10 Agency Of Ind Science & Technol 霧化薄膜作製装置用ノズル

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7067337B2 (en) 1996-05-15 2006-06-27 Seiko Epson Corporation Thin film device provided with coating film, liquid crystal panel and electronic device, and method for making the thin film device

Also Published As

Publication number Publication date
JPH0745846Y2 (ja) 1995-10-18

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