JPH03159995A - エピタキシャル結晶成長におけるドーピング方法 - Google Patents

エピタキシャル結晶成長におけるドーピング方法

Info

Publication number
JPH03159995A
JPH03159995A JP29941089A JP29941089A JPH03159995A JP H03159995 A JPH03159995 A JP H03159995A JP 29941089 A JP29941089 A JP 29941089A JP 29941089 A JP29941089 A JP 29941089A JP H03159995 A JPH03159995 A JP H03159995A
Authority
JP
Japan
Prior art keywords
gas
crystal growth
crystal
temperature
doping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP29941089A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0585518B2 (cs
Inventor
Junichi Nishizawa
潤一 西澤
Toru Kurabayashi
徹 倉林
Tomoyuki Hamano
浜野　知行
Hideyuki Kikuchi
菊地　秀幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
Original Assignee
Research Development Corp of Japan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Research Development Corp of Japan filed Critical Research Development Corp of Japan
Priority to JP29941089A priority Critical patent/JPH03159995A/ja
Publication of JPH03159995A publication Critical patent/JPH03159995A/ja
Publication of JPH0585518B2 publication Critical patent/JPH0585518B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP29941089A 1989-11-16 1989-11-16 エピタキシャル結晶成長におけるドーピング方法 Granted JPH03159995A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29941089A JPH03159995A (ja) 1989-11-16 1989-11-16 エピタキシャル結晶成長におけるドーピング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29941089A JPH03159995A (ja) 1989-11-16 1989-11-16 エピタキシャル結晶成長におけるドーピング方法

Publications (2)

Publication Number Publication Date
JPH03159995A true JPH03159995A (ja) 1991-07-09
JPH0585518B2 JPH0585518B2 (cs) 1993-12-07

Family

ID=17872202

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29941089A Granted JPH03159995A (ja) 1989-11-16 1989-11-16 エピタキシャル結晶成長におけるドーピング方法

Country Status (1)

Country Link
JP (1) JPH03159995A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119365821A (zh) 2022-06-10 2025-01-24 默克专利有限公司 组合物

Also Published As

Publication number Publication date
JPH0585518B2 (cs) 1993-12-07

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