JPH0313659Y2 - - Google Patents

Info

Publication number
JPH0313659Y2
JPH0313659Y2 JP1986068267U JP6826786U JPH0313659Y2 JP H0313659 Y2 JPH0313659 Y2 JP H0313659Y2 JP 1986068267 U JP1986068267 U JP 1986068267U JP 6826786 U JP6826786 U JP 6826786U JP H0313659 Y2 JPH0313659 Y2 JP H0313659Y2
Authority
JP
Japan
Prior art keywords
valve
electrostrictive element
flow path
valve body
bodies
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986068267U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62181769U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986068267U priority Critical patent/JPH0313659Y2/ja
Publication of JPS62181769U publication Critical patent/JPS62181769U/ja
Application granted granted Critical
Publication of JPH0313659Y2 publication Critical patent/JPH0313659Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
JP1986068267U 1986-05-08 1986-05-08 Expired JPH0313659Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986068267U JPH0313659Y2 (en:Method) 1986-05-08 1986-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986068267U JPH0313659Y2 (en:Method) 1986-05-08 1986-05-08

Publications (2)

Publication Number Publication Date
JPS62181769U JPS62181769U (en:Method) 1987-11-18
JPH0313659Y2 true JPH0313659Y2 (en:Method) 1991-03-28

Family

ID=30907926

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986068267U Expired JPH0313659Y2 (en:Method) 1986-05-08 1986-05-08

Country Status (1)

Country Link
JP (1) JPH0313659Y2 (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3566082B2 (ja) * 1998-05-26 2004-09-15 本田技研工業株式会社 エアバッグ装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6075775U (ja) * 1983-10-28 1985-05-27 株式会社小金井製作所 電子弁

Also Published As

Publication number Publication date
JPS62181769U (en:Method) 1987-11-18

Similar Documents

Publication Publication Date Title
JP3900112B2 (ja) 圧電弁
EP0544405B1 (en) Piezoelectric fluid flow control valve
US5400824A (en) Microvalve
TWI681120B (zh) 微型輸送裝置
JP2000507682A (ja) 圧電的に作動されるマイクロバルブ
JP2001317646A (ja) 圧電式流体制御弁
CA2438810A1 (en) Microfluidic valve and microactuator for a microvalve
JPH0577907B2 (en:Method)
JPH07158757A (ja) マイクロバルブ
US5460202A (en) Three-way piezoelectric valve
JPH07501124A (ja) 微小機械式配量装置用の微小機械式弁
TW201731749A (zh) 吸附裝置
US4771204A (en) Sealing method and means for fluid control device
JPH0313659Y2 (en:Method)
JPH0313658Y2 (en:Method)
JPS62261778A (ja) 電歪素子を用いた弁
JPH0313457B2 (en:Method)
JPS62261777A (ja) 電歪素子を用いた弁
JPH0336768Y2 (en:Method)
JP5952848B2 (ja) ダイアフラムの固定構造、それを備えたダイアフラムポンプ及び弁装置、並びにダイアフラムの固定方法
JPS63101588A (ja) 電歪素子を用いたアクチュエータの組立方法
JPH023019Y2 (en:Method)
JPH082592Y2 (ja) マイクロシステムガスセンサ
JPS6231784A (ja) 圧電駆動式弁
JPH0616168Y2 (ja) 方向切換弁