JPH03131086A - Flexible board - Google Patents
Flexible boardInfo
- Publication number
- JPH03131086A JPH03131086A JP26948389A JP26948389A JPH03131086A JP H03131086 A JPH03131086 A JP H03131086A JP 26948389 A JP26948389 A JP 26948389A JP 26948389 A JP26948389 A JP 26948389A JP H03131086 A JPH03131086 A JP H03131086A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- foil
- etching
- size
- copper foil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 26
- 239000011889 copper foil Substances 0.000 claims abstract description 17
- 238000005530 etching Methods 0.000 claims abstract description 15
- 229910052802 copper Inorganic materials 0.000 abstract description 8
- 239000010949 copper Substances 0.000 abstract description 8
- 239000011888 foil Substances 0.000 abstract 4
- 239000011295 pitch Substances 0.000 description 9
- 239000000758 substrate Substances 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
Landscapes
- Wire Bonding (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野コ
本発明は、フィルム上に銅箔を積層したフレキシブル基
板に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a flexible substrate in which copper foil is laminated on a film.
[従来の技術]
従来の技術としては、エツチング面全体に渡って銅箔の
厚みが均一になっており、パターニングエツチング時に
銅箔のサイドエッチ量が太き(なり、その為パターンピ
ッチ寸法も大きくなってしまう。従来基板パターン主要
部略図を第2図に示す。第2図(α)は、従来例の平面
図−で第2図(b)は第2図(α)のA−A’断面図で
ある。銅パターン2は、工0穴6のインナーリード部4
からスリット穴7を通ってアウターリード部5につなが
っている。特に工0穴6とスリット穴7の間にパターン
が集中し易り、シかもベースフィルム1のスペースが小
さい。[Conventional technology] In the conventional technology, the thickness of the copper foil is uniform over the entire etching surface, and the amount of side etch of the copper foil becomes thick during patterning etching, which results in a large pattern pitch dimension. A schematic diagram of the main parts of the conventional substrate pattern is shown in FIG. 2. FIG. 2 (α) is a plan view of the conventional example, and FIG. FIG.
It is connected to the outer lead part 5 through the slit hole 7. In particular, the pattern tends to concentrate between the cut hole 6 and the slit hole 7, and the space in the base film 1 is also small.
第2図CC)は第2図(α)のB−B’断面図である。FIG. 2 CC) is a sectional view taken along line B-B' in FIG. 2 (α).
銅パターン2と3のピッチ寸法を0に示し、パターンギ
ャップ寸法をEに示す。パターン2.3のサイドエッチ
寸法が大きいと、ギヤツブE寸法は狭(なりピッチC寸
法を大きくしなければならなかった。The pitch dimension of copper patterns 2 and 3 is indicated by 0, and the pattern gap dimension is indicated by E. When the side etch dimension of pattern 2.3 is large, the gear E dimension becomes narrow (so the pitch C dimension had to be increased).
[発明が解決しようとする課題]
し・かじ、前述の従来技術では、ICの細密多ビン化に
対応したフレキシブル基板を製造しようとする際、リー
ド引き回しパターンを配置するスペ−スが少ない為、パ
ターンとピッチが細密になり、適正なパターン幅とギャ
ップを確保して、銅箔をエツチングすることができなか
った。そこで本発明は、この様な間層点を解決するもの
で、その目的とするところは、銅箔のエツチング性を向
上させ、パターンピッチ寸法を小さ(する事により工a
の細密多ピン化に対応ずきる、細密パターンフレキシブ
ル基板を提供するところにある。[Problems to be Solved by the Invention] However, with the above-mentioned conventional technology, when trying to manufacture a flexible board that is compatible with the miniaturization and multi-bin IC, there is little space for arranging lead routing patterns. The patterns and pitches became so fine that it was impossible to ensure proper pattern width and gaps when etching the copper foil. Therefore, the present invention aims to solve this problem between layers, and its purpose is to improve the etching properties of copper foil and reduce the pattern pitch size (by reducing the pattern pitch size).
The purpose of the present invention is to provide a finely patterned flexible substrate that can cope with the increase in fineness and multi-pin design.
[課題を解決するための手段]
本発明のフレキシブル基板は、フィルム上に銅箔を積層
した7レキシプル基板において、細密パターン部の銅箔
をハーフエツチング等により薄くした事を特徴とする。[Means for Solving the Problems] The flexible substrate of the present invention is a 7-lexiple substrate in which copper foil is laminated on a film, and is characterized in that the copper foil in the fine pattern portion is thinned by half-etching or the like.
[作用コ
上記の様な構造によれば、銅箔の薄い部分のエツチング
性が極めて向上し、銅箔パターンのサイドエッチ量が向
上し、リード間ピッチ寸法を小さ(する事が可能になる
為、限られた範囲で、パターン本数を増やす事ができる
。[Effects] According to the above structure, the etching performance of the thin part of the copper foil is greatly improved, the amount of side etching of the copper foil pattern is improved, and the pitch between the leads can be reduced. , the number of patterns can be increased within a limited range.
[実施例]
第1図は、本発明による7レキシプル基板パタ一ン主要
部概要図である。第1図(α)は平面図、第1図Cb)
は、第1図(α)のa−o’間断面図、第1図(C)は
、第1図(α)のb−bt断面図である。[Example] FIG. 1 is a schematic diagram of the main parts of a 7-lexiple board pattern according to the present invention. Figure 1 (α) is a plan view, Figure 1 Cb)
is a cross-sectional view taken along line ao' in FIG. 1(α), and FIG. 1(C) is a cross-sectional view taken along line b-bt in FIG. 1(α).
銅パターン2は、ICC60インナーリード部4からス
リット穴7を通ってアウターリード部5につながってい
る。この時、ベースフィルム1の上に銅箔2が積層され
た後、部分的にハーフエツチングして薄くした部分2(
Lを有する構造になっている。この部分的に薄(なった
銅箔部は、他の銅箔の厚い部分2に比べてエツチング性
が良(,0図に示す様に、銅パターン2α、3αのサイ
ドエッチ量が減少し、パターンギャップ間寸法F部が大
きくできる為、パターン間ピッチ寸法、D部の寸法を小
さ(する事ができる構造となっている本発明の特徴は、
細密パターン部の銅箔を薄くしただけのものであり、基
板の大きさ、厚み、形状等は特別限定するものではない
。The copper pattern 2 is connected from the inner lead part 4 of the ICC 60 to the outer lead part 5 through the slit hole 7. At this time, after the copper foil 2 is laminated on the base film 1, the thinned portion 2 (
It has a structure with L. This partially thinned copper foil part has better etching properties than the other thicker parts 2 of the copper foil. The feature of the present invention is that the pattern gap dimension F part can be increased, so the pattern pitch dimension and the dimension D part can be reduced.
This is simply a thinner copper foil in the fine pattern portion, and there are no particular limitations on the size, thickness, shape, etc. of the substrate.
[発明の効果コ
以上述べた様に本発明によれば、銅箔の一部を薄(シて
エツチングするという事により、銅パターンのサイドエ
ッチ量が改善できることから、例えば、従来技術の均一
な厚みの銅箔をエツチングするものに比べて、リードピ
ッチ間寸法を30%縮める事ができ、細密多ビン化への
対応ができるとい5効果を有する。[Effects of the Invention] As described above, according to the present invention, by thinly etching a part of the copper foil, the side etch amount of the copper pattern can be improved. Compared to etching a thicker copper foil, the lead pitch dimension can be reduced by 30%, making it possible to respond to finer and more numerous bins.
第1図(α)は、本発明のフレキ7プル基板の実施例を
示す平面図。
第1図(A)は、第1図(α)のC−c′断面図。
第1図(C)は、第1図(α)のD−D’断面図。
第2図(α)は、従来技術のフレキシブル基板の実施例
を示す平面図。
第2図Ch)は、第2図(α)のA−A’断面図。
第2図(C)は、第2図(α)のB−B’断面図。
1・・・・・・・・・フレキペース材
2〜3・・・銅リードパターン
2α〜3a・・・・・・ハーフエツチング銅リードパタ
ーン
4・・・・・・・・・銅リードパターンインナーリード
部5・・・・・・・・・銅リードパターンアウターリー
ド部6・・・・・・・・・工C穴
7・・・・・・・・・スリット穴
以上FIG. 1 (α) is a plan view showing an embodiment of the flexible 7-pull board of the present invention. FIG. 1(A) is a sectional view taken along line C-c' in FIG. 1(α). FIG. 1(C) is a sectional view taken along line DD' in FIG. 1(α). FIG. 2(α) is a plan view showing an example of a conventional flexible substrate. FIG. 2 Ch) is a sectional view taken along line AA' in FIG. 2 (α). FIG. 2(C) is a sectional view taken along line BB' in FIG. 2(α). 1...Flexible paste material 2-3...Copper lead pattern 2α-3a...Half-etched copper lead pattern 4...Copper lead pattern inner Lead part 5... Copper lead pattern Outer lead part 6... Machining C hole 7... Slit hole or more
Claims (1)
て、細密パターン部の銅箔をハーフエッチ等により薄く
した事を特徴とするフレキシブル基板。A flexible board in which copper foil is laminated on a film, and is characterized in that the copper foil in the fine pattern part is thinned by half-etching or the like.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26948389A JPH03131086A (en) | 1989-10-17 | 1989-10-17 | Flexible board |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26948389A JPH03131086A (en) | 1989-10-17 | 1989-10-17 | Flexible board |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03131086A true JPH03131086A (en) | 1991-06-04 |
Family
ID=17473072
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP26948389A Pending JPH03131086A (en) | 1989-10-17 | 1989-10-17 | Flexible board |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03131086A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100667642B1 (en) * | 2004-11-11 | 2007-01-12 | 샤프 가부시키가이샤 | Flexible wiring substrate, semiconductor device and electronic device using flexible wiring substrate, and fabricating method of flexible wiring substrate |
-
1989
- 1989-10-17 JP JP26948389A patent/JPH03131086A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100667642B1 (en) * | 2004-11-11 | 2007-01-12 | 샤프 가부시키가이샤 | Flexible wiring substrate, semiconductor device and electronic device using flexible wiring substrate, and fabricating method of flexible wiring substrate |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3939692B2 (en) | Method for manufacturing surface acoustic wave filter package and package sheet used therefor | |
JPH03131086A (en) | Flexible board | |
JPH03120747A (en) | Film material for manufacturing film carrier and manufacture of the carrier | |
JPS6248053A (en) | Manufacture of lead frame for semiconductor device | |
JPH02210854A (en) | Lead frame for semiconductor device and manufacture thereof | |
US6635407B1 (en) | Two pass process for producing a fine pitch lead frame by etching | |
JPH10200234A (en) | Printed wiring board with fine pattern and manufacturing method thereof | |
JPH027536A (en) | Semiconductor device | |
JPH0458695B2 (en) | ||
JPS60240148A (en) | Manufacture of lead frame | |
JPS5824020B2 (en) | semiconductor equipment | |
JPH02302068A (en) | Transfer mold type hybrid integrated circuit | |
JPS6298795A (en) | Printed wiring board and manufacture of the same | |
JPH0563331A (en) | Printed circuit board | |
JPH02244663A (en) | Manufacture of lead frame | |
JPH04180661A (en) | Lead frame and manufacture thereof | |
JPH05110226A (en) | Manufacture of printed board | |
JPH03212963A (en) | Manufacture of lead frame | |
JPS587843A (en) | Manufacture of lead frame | |
JP2000150757A (en) | Lead frame and manufacture thereof | |
JPH04170057A (en) | Ic package | |
JP2654655B2 (en) | Manufacturing method of resistor | |
JPH07211835A (en) | Manufacture of lead frame | |
JPH05190719A (en) | Manufacture of multipin lead frame | |
JPH0595208A (en) | Film carrier |