JPH03130607A - Method and apparatus for measuring surface shape - Google Patents
Method and apparatus for measuring surface shapeInfo
- Publication number
- JPH03130607A JPH03130607A JP26825289A JP26825289A JPH03130607A JP H03130607 A JPH03130607 A JP H03130607A JP 26825289 A JP26825289 A JP 26825289A JP 26825289 A JP26825289 A JP 26825289A JP H03130607 A JPH03130607 A JP H03130607A
- Authority
- JP
- Japan
- Prior art keywords
- measured
- laser beam
- laser light
- receiver
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 16
- 238000005259 measurement Methods 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 230000000694 effects Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 241001422033 Thestylus Species 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は物体の表面形状の測定方法およびその装置、特
に表面の凹凸を検出、判定する方法および装置に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method and apparatus for measuring the surface shape of an object, and particularly to a method and apparatus for detecting and determining surface irregularities.
［従来の技術］
表面の形状を測定するには従来、触針式粗さ計、光学式
粗さ計、走査電顕式形状測定法などが知られているが、
それぞれの短所、例えば触針式では表面の損傷、走査電
顕式では測定所要時間、光学式では装置の価格、測定範
囲の限定等の問題がある。[Prior Art] Conventionally, methods such as a stylus roughness meter, an optical roughness meter, and a scanning electron microscopic shape measurement method have been known to measure the shape of a surface.
Each method has disadvantages, such as damage to the surface with the stylus method, time required for the scanning electron microscope method, and cost of the device and limited measurement range with the optical method.
［発明の解決しようとする課題］
本発明は従来技術の前述した問題点を解消すべくなされ
たものである。[Problems to be Solved by the Invention] The present invention has been made to solve the above-mentioned problems of the prior art.
［課題を解決するための手段］
本発明は、集光したレーザー光線を物体の表面に照射し
つつ走査させて表面の形状を判定する方法であって、入
射レーザー光線を含む被測定面に垂直な面内で入射レー
ザー光線を挟んだ両側に受光器を配置し、一方の受光器
の出力と他側の受光器の出力との時間差を測定すること
により被測定面上の凹状箇所、および凸状箇所を検出す
ることを特徴とする表面形状測定方法を提供するもので
ある。[Means for Solving the Problems] The present invention is a method of determining the shape of a surface of an object by scanning the surface of an object while irradiating it with a focused laser beam, the method comprises: By placing photoreceivers on both sides of the incident laser beam and measuring the time difference between the output of one photoreceiver and the output of the other photoreceiver, concave and convex portions on the surface to be measured can be detected. The present invention provides a surface shape measuring method characterized by detecting.
本発明はまた、集光したレーザー光線を物体の表面に照
射しつつ走査させて表面の形状を判定する装置であって
、入射レーザー光線を含む被測定面に垂直な面内で入射
レーザー光線を挟んだ両側に受光器を配置し、一方の受
光器の出力と他側の受光器の出力との時間差を測定する
ことにより被測定面上の凹状箇所、および凸状箇所を検
出することを特徴とする表面形状測定装置を提供するも
のである。The present invention also provides a device that determines the shape of a surface of an object by scanning the surface of an object while irradiating it with a focused laser beam, the device comprising: A surface characterized in that a concave portion and a convex portion on the surface to be measured are detected by arranging a photoreceiver on the surface and measuring the time difference between the output of one photoreceiver and the output of the photoreceiver on the other side. A shape measuring device is provided.
本発明の構成を、さらに詳しく第１図により説明する。The configuration of the present invention will be explained in more detail with reference to FIG.
被測定面２に入射したレーザー光１は被測定面２に凹凸
がなければ反射の法則に従う方向に反射され、レーザー
光１をはさんで配置された受光器３ａおよび３ｂには到
達しない。レーザー光１は被測定面２上を移動して走査
するが、これは被測定面が移動することにより行われて
もよい。いまレーザー光および受光系を左から右に走査
させる代りに、被測定面２を左方向に移動させる。被測
定面２に凹状箇所または凸状箇所があるとレーザー光の
反射光は凹凸がない場合の方向からずれて受光器３ａお
よび受光器３ｂに到達することができる。第１図におい
て被測定面２を左方向に移動させたとき、受光器３ａ、
３ｂにおける光電流の時間的経過は第２図に示すように
なり、被測定面２の凹凸に対して異る経過を示す。この
差異を識別することにより被測定面２上の凹状箇所また
は凸状箇所を判別することができる。If the surface to be measured 2 has no irregularities, the laser beam 1 incident on the surface to be measured 2 will be reflected in a direction according to the law of reflection, and will not reach the light receivers 3a and 3b placed across the laser beam 1. The laser beam 1 moves and scans the surface to be measured 2, but this may be performed by moving the surface to be measured. Now, instead of scanning the laser beam and light receiving system from left to right, the surface to be measured 2 is moved to the left. If there is a concave or convex portion on the surface 2 to be measured, the reflected laser beam can reach the light receivers 3a and 3b in a direction different from the direction in the case where there are no unevenness. When the surface to be measured 2 is moved to the left in FIG. 1, the light receiver 3a,
The time course of the photocurrent in 3b is as shown in FIG. 2, and shows a different course depending on the unevenness of the surface 2 to be measured. By identifying this difference, a concave portion or a convex portion on the surface 2 to be measured can be determined.
即ち凸状の場合には、凸状箇所の移動方向前側に位置す
る受光器に先ず光電流が流れ、その後後側の受光器に光
電流が流れる。また凹状の場合には、先ず後側の受光器
に光電流が流れ、その後前側の受光器に光電流が流れる
。移動方向を逆にしても、凸状の場合には光電流が先ず
前側の受光器に流れその後後側の受光器に流れ、凹状の
場合には光電流が先ず後側の受光器に流れその後前側の
受光器に流れる。That is, in the case of a convex shape, a photocurrent first flows to a light receiver located in front of the convex portion in the direction of movement, and then a photocurrent flows to a light receiver located behind the convex portion. Further, in the case of a concave shape, a photocurrent flows first to the light receiver on the rear side, and then to the light receiver on the front side. Even if the direction of movement is reversed, if the shape is convex, the photocurrent will first flow to the front receiver, and then to the rear receiver; if the shape is concave, the photocurrent will first flow to the rear receiver, and then Flows to the front receiver.
［作用］
レーザー光の被測定面への入射角は特に限定はないが、
垂直とすることにより光学系が走査方向に対称となり、
調整も容易となるので望ましい。[Function] There is no particular limitation on the angle of incidence of the laser beam on the surface to be measured, but
By making it vertical, the optical system becomes symmetrical in the scanning direction,
This is desirable because adjustment becomes easy.
［実施例］
レーザー光源にＨｅ−Ｎｅガスレーザー０．５ｍＷを用
い、焦点距離４７０１１１１のレンズにて被測定面に約
５０μｍに集光されたレーザースポットを測定面に垂直
に照射しつつ毎秒２ｍの速度で研摩されたガラス板上に
走査させた。走査方向に４５６の光電流を増巾し、第２
図に示した判定により直径ＩＯμｍ、深さ１μｍの凹凸
が判定できた。[Example] A He-Ne gas laser of 0.5 mW was used as a laser light source, and a laser spot focused at approximately 50 μm on the surface to be measured was irradiated perpendicularly to the surface to be measured using a lens with a focal length of 4701111 at a rate of 2 m/s. It was scanned onto a glass plate that was polished at high speed. 456 photocurrents are amplified in the scanning direction, and the second
According to the determination shown in the figure, irregularities with a diameter of IO μm and a depth of 1 μm could be determined.
［発明の効果］
本発明の方法および装置によれば、レーザー光による非
接触測定のため被測定面を損傷することなく高速に広範
囲の被測定面を走査して迅速に表面形状の凹凸を正しく
判別評価することができ、産業上その効果が大きい。[Effects of the Invention] According to the method and apparatus of the present invention, the surface to be measured can be scanned over a wide range at high speed without damaging the surface to be measured due to non-contact measurement using laser light, and the unevenness of the surface shape can be quickly and accurately determined. Discriminative evaluation can be performed, and its effects are large in industry.
また本発明の方法および装置は、光による非接触性、迅
速性、また平面、曲面を問わない被測定面の非制限性、
さらに装置の構成の簡易性、それによる経済性など優れ
た効果を有する。In addition, the method and apparatus of the present invention are non-contact and quick with light, and the surface to be measured is not limited regardless of whether it is a flat or curved surface.
Furthermore, it has excellent effects such as the simplicity of the structure of the device and the resulting economic efficiency.
第１図は本発明の構成の模式図、第２図は光電流の時間
的経過の模式図である。
１・・・集光されたレーザー光
２・・・被測定面
３ａ、３ｂ・・・受光器FIG. 1 is a schematic diagram of the configuration of the present invention, and FIG. 2 is a schematic diagram of the time course of photocurrent. 1... Focused laser beam 2... Measured surface 3a, 3b... Light receiver
Claims (3)
走査させて表面の形状を判定する方法であって、入射レ
ーザー光線を含む被測定面に垂直な面内で入射レーザー
光線を挟んだ両側に受光器を配置し、一方の受光器の出
力と他側の受光器の出力との時間差を測定することによ
り被測定面上の凹状箇所、および凸状箇所を検出するこ
とを特徴とする表面形状測定方法。(1) A method of determining the shape of the surface of an object by irradiating and scanning the surface of an object with a focused laser beam, in which light is received on both sides of the incident laser beam in a plane perpendicular to the surface to be measured that includes the incident laser beam. Surface shape measurement characterized by detecting concave and convex spots on the surface to be measured by arranging a receiver and measuring the time difference between the output of one receiver and the output of the other receiver. Method.
あることを特徴とする請求項１記載の表面形状測定方法
。(2) The surface shape measuring method according to claim 1, wherein the incident laser beam is perpendicularly incident on the surface to be measured.
走査させて表面の形状を判定する装置であって、入射レ
ーザー光線を含む被測定面に垂直な面内で入射レーザー
光線を挟んだ両側に受光器を配置し、一方の受光器の出
力と他側の受光器の出力との時間差を測定することによ
り被測定面上の凹状箇所、および凸状箇所を検出するこ
とを特徴とする表面形状測定装置。(3) A device that determines the shape of an object's surface by scanning it with a focused laser beam, and receives light on both sides of the incident laser beam in a plane perpendicular to the surface to be measured that includes the incident laser beam. Surface shape measurement characterized by detecting concave and convex spots on the surface to be measured by arranging a receiver and measuring the time difference between the output of one receiver and the output of the other receiver. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26825289A JPH03130607A (en) | 1989-10-17 | 1989-10-17 | Method and apparatus for measuring surface shape |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26825289A JPH03130607A (en) | 1989-10-17 | 1989-10-17 | Method and apparatus for measuring surface shape |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03130607A true JPH03130607A (en) | 1991-06-04 |
Family
ID=17455998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26825289A Pending JPH03130607A (en) | 1989-10-17 | 1989-10-17 | Method and apparatus for measuring surface shape |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03130607A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008268008A (en) * | 2007-04-20 | 2008-11-06 | Nidec Tosok Corp | Appearance inspection method |
-
1989
- 1989-10-17 JP JP26825289A patent/JPH03130607A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008268008A (en) * | 2007-04-20 | 2008-11-06 | Nidec Tosok Corp | Appearance inspection method |
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