JPH03128944U - - Google Patents

Info

Publication number
JPH03128944U
JPH03128944U JP3710990U JP3710990U JPH03128944U JP H03128944 U JPH03128944 U JP H03128944U JP 3710990 U JP3710990 U JP 3710990U JP 3710990 U JP3710990 U JP 3710990U JP H03128944 U JPH03128944 U JP H03128944U
Authority
JP
Japan
Prior art keywords
tip
functions
chuck
arm
buried
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3710990U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3710990U priority Critical patent/JPH03128944U/ja
Publication of JPH03128944U publication Critical patent/JPH03128944U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第1図は本考案の第1実施例に係るチヤツクの
平面図、第2図は第1図のA−A線断面図、第3
図は本考案の第2実施例に係るチヤツクの平面図
、第4図は第3図のB−B線断面図、第5図は本
考案の第3実施例に係るチヤツクの平面図、第6
図は第5図のC−C線断面図である。 尚、図面中1,21はチヤツク、2,22はア
ーム部、3,23はチヤツク部、4,5,24は
電極、9,27,31は吸引溝である。

Claims (1)

    【実用新案登録請求の範囲】
  1. セラミツク製アームの先端に静電チヤツクとし
    ての機能を発揮する電極を埋設するとともに、前
    記アームの先端表面に真空チヤツクとしての機能
    を発揮する吸引溝を形成したことを特徴とする搬
    送用チヤツク。
JP3710990U 1990-04-06 1990-04-06 Pending JPH03128944U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3710990U JPH03128944U (ja) 1990-04-06 1990-04-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3710990U JPH03128944U (ja) 1990-04-06 1990-04-06

Publications (1)

Publication Number Publication Date
JPH03128944U true JPH03128944U (ja) 1991-12-25

Family

ID=31543925

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3710990U Pending JPH03128944U (ja) 1990-04-06 1990-04-06

Country Status (1)

Country Link
JP (1) JPH03128944U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005050855A (ja) * 2003-07-29 2005-02-24 Lintec Corp 吸着搬送装置
JP2011077288A (ja) * 2009-09-30 2011-04-14 Tokyo Electron Ltd 搬送装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005050855A (ja) * 2003-07-29 2005-02-24 Lintec Corp 吸着搬送装置
JP2011077288A (ja) * 2009-09-30 2011-04-14 Tokyo Electron Ltd 搬送装置

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