JPS6441137U - - Google Patents
Info
- Publication number
- JPS6441137U JPS6441137U JP13571387U JP13571387U JPS6441137U JP S6441137 U JPS6441137 U JP S6441137U JP 13571387 U JP13571387 U JP 13571387U JP 13571387 U JP13571387 U JP 13571387U JP S6441137 U JPS6441137 U JP S6441137U
- Authority
- JP
- Japan
- Prior art keywords
- flat substrate
- suction pipe
- substrate
- suction
- protrusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Jigs For Machine Tools (AREA)
Description
第１図ａは本考案の第１の実施例の上面図、第
１図ｂは第１図ａのＸ―Ｘ′線断面図、第２図ａ
は第２の実施例の上面図、第２図ｂは第２図ａの
Ｘ―Ｘ′線断面図、第３図ａは従来の上面図、第
３図ｂは第３図ａのＸ―Ｘ′線断面図である。 １……平板状基体、２……吸出パイプ、３，３
―１〜３―４……吸入口、４，４―１〜４―４…
…突起。
１図ｂは第１図ａのＸ―Ｘ′線断面図、第２図ａ
は第２の実施例の上面図、第２図ｂは第２図ａの
Ｘ―Ｘ′線断面図、第３図ａは従来の上面図、第
３図ｂは第３図ａのＸ―Ｘ′線断面図である。 １……平板状基体、２……吸出パイプ、３，３
―１〜３―４……吸入口、４，４―１〜４―４…
…突起。
Claims (1)
- 平板状基体の一方の面に設けられた吸出パイプ
と、前記平板状基体の他方の面に設けられ前記吸
出パイプの孔に連結した吸入口と、前記平板状基
体の他方の面の周縁部に設けられた突起とを有す
ることを特徴とする半導体基板吸着チヤツク。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13571387U JPS6441137U (ja) | 1987-09-04 | 1987-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13571387U JPS6441137U (ja) | 1987-09-04 | 1987-09-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6441137U true JPS6441137U (ja) | 1989-03-13 |
Family
ID=31395588
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13571387U Pending JPS6441137U (ja) | 1987-09-04 | 1987-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6441137U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0688028U (ja) * | 1993-06-07 | 1994-12-22 | 日本無線株式会社 | 照明付き防水装置 |
-
1987
- 1987-09-04 JP JP13571387U patent/JPS6441137U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0688028U (ja) * | 1993-06-07 | 1994-12-22 | 日本無線株式会社 | 照明付き防水装置 |