JPH0312439U - - Google Patents
Info
- Publication number
- JPH0312439U JPH0312439U JP7285189U JP7285189U JPH0312439U JP H0312439 U JPH0312439 U JP H0312439U JP 7285189 U JP7285189 U JP 7285189U JP 7285189 U JP7285189 U JP 7285189U JP H0312439 U JPH0312439 U JP H0312439U
- Authority
- JP
- Japan
- Prior art keywords
- base
- semiconductor wafer
- fixed roller
- roller pins
- positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 4
- 235000012431 wafers Nutrition 0.000 claims 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7285189U JPH0312439U (fr) | 1989-06-21 | 1989-06-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7285189U JPH0312439U (fr) | 1989-06-21 | 1989-06-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0312439U true JPH0312439U (fr) | 1991-02-07 |
Family
ID=31611156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7285189U Pending JPH0312439U (fr) | 1989-06-21 | 1989-06-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0312439U (fr) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002080267A (ja) * | 2000-09-08 | 2002-03-19 | Yoshiteru Matsubara | 多孔質の陶磁物及びその製造方法 |
| JP2008192963A (ja) * | 2007-02-07 | 2008-08-21 | Oki Electric Ind Co Ltd | ガイド部材の位置決め方法、及び基板の位置決め方法 |
| JP2009054269A (ja) * | 2007-08-02 | 2009-03-12 | Ricoh Co Ltd | 回転機構及び電子線描画装置 |
| JP2012028814A (ja) * | 2011-10-24 | 2012-02-09 | Lintec Corp | シート剥離装置 |
| JP2015095542A (ja) * | 2013-11-12 | 2015-05-18 | 株式会社ディスコ | 位置出しテーブル |
| JP2017069263A (ja) * | 2015-09-28 | 2017-04-06 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板保持装置 |
-
1989
- 1989-06-21 JP JP7285189U patent/JPH0312439U/ja active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002080267A (ja) * | 2000-09-08 | 2002-03-19 | Yoshiteru Matsubara | 多孔質の陶磁物及びその製造方法 |
| JP4489919B2 (ja) * | 2000-09-08 | 2010-06-23 | 善輝 松原 | 多孔質の陶磁物の製造方法 |
| JP2008192963A (ja) * | 2007-02-07 | 2008-08-21 | Oki Electric Ind Co Ltd | ガイド部材の位置決め方法、及び基板の位置決め方法 |
| JP2009054269A (ja) * | 2007-08-02 | 2009-03-12 | Ricoh Co Ltd | 回転機構及び電子線描画装置 |
| JP2012028814A (ja) * | 2011-10-24 | 2012-02-09 | Lintec Corp | シート剥離装置 |
| JP2015095542A (ja) * | 2013-11-12 | 2015-05-18 | 株式会社ディスコ | 位置出しテーブル |
| JP2017069263A (ja) * | 2015-09-28 | 2017-04-06 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板保持装置 |