JPH01173931U - - Google Patents
Info
- Publication number
- JPH01173931U JPH01173931U JP6898688U JP6898688U JPH01173931U JP H01173931 U JPH01173931 U JP H01173931U JP 6898688 U JP6898688 U JP 6898688U JP 6898688 U JP6898688 U JP 6898688U JP H01173931 U JPH01173931 U JP H01173931U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- semiconductor wafer
- coating device
- resist coating
- semiconductor wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 4
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6898688U JPH01173931U (fr) | 1988-05-25 | 1988-05-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6898688U JPH01173931U (fr) | 1988-05-25 | 1988-05-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01173931U true JPH01173931U (fr) | 1989-12-11 |
Family
ID=31294278
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6898688U Pending JPH01173931U (fr) | 1988-05-25 | 1988-05-25 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01173931U (fr) |
-
1988
- 1988-05-25 JP JP6898688U patent/JPH01173931U/ja active Pending