JPH0312245U - - Google Patents
Info
- Publication number
- JPH0312245U JPH0312245U JP7241789U JP7241789U JPH0312245U JP H0312245 U JPH0312245 U JP H0312245U JP 7241789 U JP7241789 U JP 7241789U JP 7241789 U JP7241789 U JP 7241789U JP H0312245 U JPH0312245 U JP H0312245U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- frame
- pellicle membrane
- membrane
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012528 membrane Substances 0.000 claims description 4
- 239000000428 dust Substances 0.000 claims 1
- 238000001459 lithography Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 1
- 229910001285 shape-memory alloy Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7241789U JPH0312245U (de) | 1989-06-22 | 1989-06-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7241789U JPH0312245U (de) | 1989-06-22 | 1989-06-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0312245U true JPH0312245U (de) | 1991-02-07 |
Family
ID=31610332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7241789U Pending JPH0312245U (de) | 1989-06-22 | 1989-06-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0312245U (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012058400A (ja) * | 2010-09-07 | 2012-03-22 | Asahi Kasei E-Materials Corp | ペリクルの製造方法 |
| JP2013195852A (ja) * | 2012-03-21 | 2013-09-30 | Asahi Kasei E-Materials Corp | ペリクルの製造方法及びペリクル |
-
1989
- 1989-06-22 JP JP7241789U patent/JPH0312245U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012058400A (ja) * | 2010-09-07 | 2012-03-22 | Asahi Kasei E-Materials Corp | ペリクルの製造方法 |
| JP2013195852A (ja) * | 2012-03-21 | 2013-09-30 | Asahi Kasei E-Materials Corp | ペリクルの製造方法及びペリクル |