JPS6265654U - - Google Patents
Info
- Publication number
- JPS6265654U JPS6265654U JP1985158401U JP15840185U JPS6265654U JP S6265654 U JPS6265654 U JP S6265654U JP 1985158401 U JP1985158401 U JP 1985158401U JP 15840185 U JP15840185 U JP 15840185U JP S6265654 U JPS6265654 U JP S6265654U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic band
- frame
- pellicle
- mask substrate
- attracted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985158401U JPS6265654U (de) | 1985-10-15 | 1985-10-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985158401U JPS6265654U (de) | 1985-10-15 | 1985-10-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6265654U true JPS6265654U (de) | 1987-04-23 |
Family
ID=31081854
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985158401U Pending JPS6265654U (de) | 1985-10-15 | 1985-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6265654U (de) |
-
1985
- 1985-10-15 JP JP1985158401U patent/JPS6265654U/ja active Pending