JPS6454043U - - Google Patents
Info
- Publication number
- JPS6454043U JPS6454043U JP1987149923U JP14992387U JPS6454043U JP S6454043 U JPS6454043 U JP S6454043U JP 1987149923 U JP1987149923 U JP 1987149923U JP 14992387 U JP14992387 U JP 14992387U JP S6454043 U JPS6454043 U JP S6454043U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- frame
- substrate
- frames
- pellicle frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 239000012528 membrane Substances 0.000 claims 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987149923U JPS6454043U (de) | 1987-09-30 | 1987-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987149923U JPS6454043U (de) | 1987-09-30 | 1987-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6454043U true JPS6454043U (de) | 1989-04-04 |
Family
ID=31422598
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987149923U Pending JPS6454043U (de) | 1987-09-30 | 1987-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6454043U (de) |
-
1987
- 1987-09-30 JP JP1987149923U patent/JPS6454043U/ja active Pending