JPH0311885Y2 - - Google Patents

Info

Publication number
JPH0311885Y2
JPH0311885Y2 JP1985133638U JP13363885U JPH0311885Y2 JP H0311885 Y2 JPH0311885 Y2 JP H0311885Y2 JP 1985133638 U JP1985133638 U JP 1985133638U JP 13363885 U JP13363885 U JP 13363885U JP H0311885 Y2 JPH0311885 Y2 JP H0311885Y2
Authority
JP
Japan
Prior art keywords
container
chemical solution
pressure
scale
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985133638U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6242240U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985133638U priority Critical patent/JPH0311885Y2/ja
Publication of JPS6242240U publication Critical patent/JPS6242240U/ja
Application granted granted Critical
Publication of JPH0311885Y2 publication Critical patent/JPH0311885Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Weting (AREA)
JP1985133638U 1985-08-30 1985-08-30 Expired JPH0311885Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985133638U JPH0311885Y2 (enrdf_load_stackoverflow) 1985-08-30 1985-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985133638U JPH0311885Y2 (enrdf_load_stackoverflow) 1985-08-30 1985-08-30

Publications (2)

Publication Number Publication Date
JPS6242240U JPS6242240U (enrdf_load_stackoverflow) 1987-03-13
JPH0311885Y2 true JPH0311885Y2 (enrdf_load_stackoverflow) 1991-03-20

Family

ID=31034130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985133638U Expired JPH0311885Y2 (enrdf_load_stackoverflow) 1985-08-30 1985-08-30

Country Status (1)

Country Link
JP (1) JPH0311885Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2620096B2 (ja) * 1988-02-29 1997-06-11 東京エレクトロン株式会社 塗布装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5139665B2 (enrdf_load_stackoverflow) * 1972-08-09 1976-10-29
JPS5050871A (enrdf_load_stackoverflow) * 1973-09-05 1975-05-07
JPS5835952U (ja) * 1981-09-03 1983-03-09 三菱電機株式会社 液体噴霧装置
JPS61147257A (ja) * 1984-12-20 1986-07-04 Fujitsu Ltd 現像装置

Also Published As

Publication number Publication date
JPS6242240U (enrdf_load_stackoverflow) 1987-03-13

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