JPS6242240U - - Google Patents

Info

Publication number
JPS6242240U
JPS6242240U JP13363885U JP13363885U JPS6242240U JP S6242240 U JPS6242240 U JP S6242240U JP 13363885 U JP13363885 U JP 13363885U JP 13363885 U JP13363885 U JP 13363885U JP S6242240 U JPS6242240 U JP S6242240U
Authority
JP
Japan
Prior art keywords
container
chemical solution
amount
pressure
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13363885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0311885Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985133638U priority Critical patent/JPH0311885Y2/ja
Publication of JPS6242240U publication Critical patent/JPS6242240U/ja
Application granted granted Critical
Publication of JPH0311885Y2 publication Critical patent/JPH0311885Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Weting (AREA)
JP1985133638U 1985-08-30 1985-08-30 Expired JPH0311885Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985133638U JPH0311885Y2 (enrdf_load_stackoverflow) 1985-08-30 1985-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985133638U JPH0311885Y2 (enrdf_load_stackoverflow) 1985-08-30 1985-08-30

Publications (2)

Publication Number Publication Date
JPS6242240U true JPS6242240U (enrdf_load_stackoverflow) 1987-03-13
JPH0311885Y2 JPH0311885Y2 (enrdf_load_stackoverflow) 1991-03-20

Family

ID=31034130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985133638U Expired JPH0311885Y2 (enrdf_load_stackoverflow) 1985-08-30 1985-08-30

Country Status (1)

Country Link
JP (1) JPH0311885Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01220827A (ja) * 1988-02-29 1989-09-04 Tokyo Electron Ltd 塗布装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4935436A (enrdf_load_stackoverflow) * 1972-08-09 1974-04-02
JPS5050871A (enrdf_load_stackoverflow) * 1973-09-05 1975-05-07
JPS5835952U (ja) * 1981-09-03 1983-03-09 三菱電機株式会社 液体噴霧装置
JPS61147257A (ja) * 1984-12-20 1986-07-04 Fujitsu Ltd 現像装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4935436A (enrdf_load_stackoverflow) * 1972-08-09 1974-04-02
JPS5050871A (enrdf_load_stackoverflow) * 1973-09-05 1975-05-07
JPS5835952U (ja) * 1981-09-03 1983-03-09 三菱電機株式会社 液体噴霧装置
JPS61147257A (ja) * 1984-12-20 1986-07-04 Fujitsu Ltd 現像装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01220827A (ja) * 1988-02-29 1989-09-04 Tokyo Electron Ltd 塗布装置

Also Published As

Publication number Publication date
JPH0311885Y2 (enrdf_load_stackoverflow) 1991-03-20

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