JPH03117828U - - Google Patents
Info
- Publication number
- JPH03117828U JPH03117828U JP2715290U JP2715290U JPH03117828U JP H03117828 U JPH03117828 U JP H03117828U JP 2715290 U JP2715290 U JP 2715290U JP 2715290 U JP2715290 U JP 2715290U JP H03117828 U JPH03117828 U JP H03117828U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer stage
- exposure
- reticle
- reduction lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009434 installation Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2715290U JPH03117828U (enrdf_load_stackoverflow) | 1990-03-19 | 1990-03-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2715290U JPH03117828U (enrdf_load_stackoverflow) | 1990-03-19 | 1990-03-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03117828U true JPH03117828U (enrdf_load_stackoverflow) | 1991-12-05 |
Family
ID=31530020
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2715290U Pending JPH03117828U (enrdf_load_stackoverflow) | 1990-03-19 | 1990-03-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03117828U (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008277296A (ja) * | 2007-05-07 | 2008-11-13 | Hon Hai Precision Industry Co Ltd | カード用コネクタ及びカード用コネクタ組立体 |
-
1990
- 1990-03-19 JP JP2715290U patent/JPH03117828U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008277296A (ja) * | 2007-05-07 | 2008-11-13 | Hon Hai Precision Industry Co Ltd | カード用コネクタ及びカード用コネクタ組立体 |
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