JPH0311650Y2 - - Google Patents
Info
- Publication number
- JPH0311650Y2 JPH0311650Y2 JP1986170035U JP17003586U JPH0311650Y2 JP H0311650 Y2 JPH0311650 Y2 JP H0311650Y2 JP 1986170035 U JP1986170035 U JP 1986170035U JP 17003586 U JP17003586 U JP 17003586U JP H0311650 Y2 JPH0311650 Y2 JP H0311650Y2
- Authority
- JP
- Japan
- Prior art keywords
- low pressure
- filter
- pressure loss
- clean room
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005192 partition Methods 0.000 claims description 6
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 239000011162 core material Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 210000000744 eyelid Anatomy 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986170035U JPH0311650Y2 (US06589383-20030708-C00041.png) | 1986-11-04 | 1986-11-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986170035U JPH0311650Y2 (US06589383-20030708-C00041.png) | 1986-11-04 | 1986-11-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6375733U JPS6375733U (US06589383-20030708-C00041.png) | 1988-05-20 |
| JPH0311650Y2 true JPH0311650Y2 (US06589383-20030708-C00041.png) | 1991-03-20 |
Family
ID=31104396
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986170035U Expired JPH0311650Y2 (US06589383-20030708-C00041.png) | 1986-11-04 | 1986-11-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0311650Y2 (US06589383-20030708-C00041.png) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2655400B2 (ja) * | 1995-09-26 | 1997-09-17 | ベニックス株式会社 | クリーンルームの間仕切構造 |
| JP2655399B2 (ja) * | 1995-09-26 | 1997-09-17 | ベニックス株式会社 | クリーンルームの間仕切構造 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS597836A (ja) * | 1982-07-06 | 1984-01-17 | Oshitari Kenkyusho:Kk | 垂直層流式無塵室 |
| JPS6099943A (ja) * | 1983-11-02 | 1985-06-03 | Hitachi Ltd | クリ−ンル−ム |
-
1986
- 1986-11-04 JP JP1986170035U patent/JPH0311650Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS597836A (ja) * | 1982-07-06 | 1984-01-17 | Oshitari Kenkyusho:Kk | 垂直層流式無塵室 |
| JPS6099943A (ja) * | 1983-11-02 | 1985-06-03 | Hitachi Ltd | クリ−ンル−ム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6375733U (US06589383-20030708-C00041.png) | 1988-05-20 |
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