JPH03115660U - - Google Patents

Info

Publication number
JPH03115660U
JPH03115660U JP2305190U JP2305190U JPH03115660U JP H03115660 U JPH03115660 U JP H03115660U JP 2305190 U JP2305190 U JP 2305190U JP 2305190 U JP2305190 U JP 2305190U JP H03115660 U JPH03115660 U JP H03115660U
Authority
JP
Japan
Prior art keywords
target
film
sputtering
magnet
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2305190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2305190U priority Critical patent/JPH03115660U/ja
Publication of JPH03115660U publication Critical patent/JPH03115660U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2305190U 1990-03-07 1990-03-07 Pending JPH03115660U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2305190U JPH03115660U (enrdf_load_stackoverflow) 1990-03-07 1990-03-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2305190U JPH03115660U (enrdf_load_stackoverflow) 1990-03-07 1990-03-07

Publications (1)

Publication Number Publication Date
JPH03115660U true JPH03115660U (enrdf_load_stackoverflow) 1991-11-29

Family

ID=31526050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2305190U Pending JPH03115660U (enrdf_load_stackoverflow) 1990-03-07 1990-03-07

Country Status (1)

Country Link
JP (1) JPH03115660U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101531409B1 (ko) * 2013-11-20 2015-06-24 함덕성 식품용 실리콘 종이 포장용기

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101531409B1 (ko) * 2013-11-20 2015-06-24 함덕성 식품용 실리콘 종이 포장용기

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