JPS61195047U - - Google Patents
Info
- Publication number
- JPS61195047U JPS61195047U JP7915985U JP7915985U JPS61195047U JP S61195047 U JPS61195047 U JP S61195047U JP 7915985 U JP7915985 U JP 7915985U JP 7915985 U JP7915985 U JP 7915985U JP S61195047 U JPS61195047 U JP S61195047U
- Authority
- JP
- Japan
- Prior art keywords
- metal container
- microwaves
- microwave
- thin film
- injected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 9
- 239000010409 thin film Substances 0.000 claims description 6
- 238000002347 injection Methods 0.000 claims 4
- 239000007924 injection Substances 0.000 claims 4
- 230000004907 flux Effects 0.000 claims 2
- 150000002500 ions Chemical class 0.000 claims 2
- 230000005540 biological transmission Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7915985U JPS61195047U (enrdf_load_stackoverflow) | 1985-05-27 | 1985-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7915985U JPS61195047U (enrdf_load_stackoverflow) | 1985-05-27 | 1985-05-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61195047U true JPS61195047U (enrdf_load_stackoverflow) | 1986-12-04 |
Family
ID=30623810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7915985U Pending JPS61195047U (enrdf_load_stackoverflow) | 1985-05-27 | 1985-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61195047U (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01275748A (ja) * | 1988-04-28 | 1989-11-06 | Nippon Telegr & Teleph Corp <Ntt> | プラズマ生成装置 |
-
1985
- 1985-05-27 JP JP7915985U patent/JPS61195047U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01275748A (ja) * | 1988-04-28 | 1989-11-06 | Nippon Telegr & Teleph Corp <Ntt> | プラズマ生成装置 |
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