JPH01106561U - - Google Patents

Info

Publication number
JPH01106561U
JPH01106561U JP20090687U JP20090687U JPH01106561U JP H01106561 U JPH01106561 U JP H01106561U JP 20090687 U JP20090687 U JP 20090687U JP 20090687 U JP20090687 U JP 20090687U JP H01106561 U JPH01106561 U JP H01106561U
Authority
JP
Japan
Prior art keywords
substrate
target
side wall
wall portion
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20090687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20090687U priority Critical patent/JPH01106561U/ja
Publication of JPH01106561U publication Critical patent/JPH01106561U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP20090687U 1987-12-29 1987-12-29 Pending JPH01106561U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20090687U JPH01106561U (enrdf_load_stackoverflow) 1987-12-29 1987-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20090687U JPH01106561U (enrdf_load_stackoverflow) 1987-12-29 1987-12-29

Publications (1)

Publication Number Publication Date
JPH01106561U true JPH01106561U (enrdf_load_stackoverflow) 1989-07-18

Family

ID=31491291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20090687U Pending JPH01106561U (enrdf_load_stackoverflow) 1987-12-29 1987-12-29

Country Status (1)

Country Link
JP (1) JPH01106561U (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5921662B2 (ja) * 1979-12-28 1984-05-21 井関農機株式会社 自動籾摺選別装置に於ける仕切上米篩別装置
JPS61210190A (ja) * 1985-03-14 1986-09-18 Nippon Denso Co Ltd 薄膜形成装置
JPS62200905A (ja) * 1986-02-28 1987-09-04 Matsushita Electric Ind Co Ltd デイレ−ライン

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5921662B2 (ja) * 1979-12-28 1984-05-21 井関農機株式会社 自動籾摺選別装置に於ける仕切上米篩別装置
JPS61210190A (ja) * 1985-03-14 1986-09-18 Nippon Denso Co Ltd 薄膜形成装置
JPS62200905A (ja) * 1986-02-28 1987-09-04 Matsushita Electric Ind Co Ltd デイレ−ライン

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