JPH0310840B2 - - Google Patents

Info

Publication number
JPH0310840B2
JPH0310840B2 JP10064582A JP10064582A JPH0310840B2 JP H0310840 B2 JPH0310840 B2 JP H0310840B2 JP 10064582 A JP10064582 A JP 10064582A JP 10064582 A JP10064582 A JP 10064582A JP H0310840 B2 JPH0310840 B2 JP H0310840B2
Authority
JP
Japan
Prior art keywords
tank
vacuum
vacuum chamber
auxiliary tank
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10064582A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58217896A (ja
Inventor
Noriaki Mukai
Tadashi Takagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Techno Engineering Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Techno Engineering Co Ltd, Hitachi Ltd filed Critical Hitachi Techno Engineering Co Ltd
Priority to JP10064582A priority Critical patent/JPS58217896A/ja
Publication of JPS58217896A publication Critical patent/JPS58217896A/ja
Publication of JPH0310840B2 publication Critical patent/JPH0310840B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP10064582A 1982-06-14 1982-06-14 真空槽内の液体の排出装置 Granted JPS58217896A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10064582A JPS58217896A (ja) 1982-06-14 1982-06-14 真空槽内の液体の排出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10064582A JPS58217896A (ja) 1982-06-14 1982-06-14 真空槽内の液体の排出装置

Publications (2)

Publication Number Publication Date
JPS58217896A JPS58217896A (ja) 1983-12-17
JPH0310840B2 true JPH0310840B2 (enrdf_load_stackoverflow) 1991-02-14

Family

ID=14279556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10064582A Granted JPS58217896A (ja) 1982-06-14 1982-06-14 真空槽内の液体の排出装置

Country Status (1)

Country Link
JP (1) JPS58217896A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6533420B2 (ja) * 2015-06-22 2019-06-19 株式会社ヒラノテクシード 吸引装置とそれを用いたウエブの接続装置

Also Published As

Publication number Publication date
JPS58217896A (ja) 1983-12-17

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