JPH03102754A - プローブから出た電子を検出する装置を備えた走査トンネル顕微鏡 - Google Patents

プローブから出た電子を検出する装置を備えた走査トンネル顕微鏡

Info

Publication number
JPH03102754A
JPH03102754A JP2132768A JP13276890A JPH03102754A JP H03102754 A JPH03102754 A JP H03102754A JP 2132768 A JP2132768 A JP 2132768A JP 13276890 A JP13276890 A JP 13276890A JP H03102754 A JPH03102754 A JP H03102754A
Authority
JP
Japan
Prior art keywords
sample
chip
emission
microscope
electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2132768A
Other languages
English (en)
Japanese (ja)
Inventor
Josef Frohn
ヨゼフ・フローン
Harald Ibach
ハラルト・イバッハ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Juelich GmbH
Original Assignee
Forschungszentrum Juelich GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungszentrum Juelich GmbH filed Critical Forschungszentrum Juelich GmbH
Publication of JPH03102754A publication Critical patent/JPH03102754A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/852—Manufacture, treatment, or detection of nanostructure with scanning probe for detection of specific nanostructure sample or nanostructure-related property
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/861—Scanning tunneling probe

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP2132768A 1989-06-05 1990-05-24 プローブから出た電子を検出する装置を備えた走査トンネル顕微鏡 Pending JPH03102754A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3918249.5 1989-06-05
DE3918249A DE3918249C1 (enExample) 1989-06-05 1989-06-05

Publications (1)

Publication Number Publication Date
JPH03102754A true JPH03102754A (ja) 1991-04-30

Family

ID=6382069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2132768A Pending JPH03102754A (ja) 1989-06-05 1990-05-24 プローブから出た電子を検出する装置を備えた走査トンネル顕微鏡

Country Status (4)

Country Link
US (1) US5099117A (enExample)
EP (1) EP0401658B1 (enExample)
JP (1) JPH03102754A (enExample)
DE (2) DE3918249C1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2744346B2 (ja) * 1990-10-19 1998-04-28 キヤノン株式会社 情報記録ユニットと情報記録及び／又は再生装置と情報記録及び／又は再生方法と情報記録媒体
DE4133121A1 (de) * 1991-10-05 1993-04-08 Inst Festkoerperphysik Und Ele Anordnung zur erzeugung einer feinfokussierten niederenergetischen ionensonde
US5278406A (en) * 1992-11-12 1994-01-11 Hamamatsu Photonics K.K. Apparatus for detecting information contained in electrons emitted from sample surface
JP3153366B2 (ja) * 1992-12-04 2001-04-09 日本電子株式会社 走査トンネル顕微鏡
JP3270165B2 (ja) * 1993-01-22 2002-04-02 セイコーインスツルメンツ株式会社 表面分析及び加工装置
US5559330A (en) * 1993-12-20 1996-09-24 Nippon Telegraph And Telephone Corporation Scanning tunneling microscope
US5541410A (en) * 1995-07-11 1996-07-30 Board Of Regents, University Of Nebraska-Lincoln Reduced diameter retractable cylindrical mirror analyzer
US6184523B1 (en) 1998-07-14 2001-02-06 Board Of Regents Of The University Of Nebraska High resolution charged particle-energy detecting, multiple sequential stage, compact, small diameter, retractable cylindrical mirror analyzer system, and method of use
DE102004012520A1 (de) * 2004-03-05 2005-09-29 Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. Punktquelle für Elektronen-Feldemissionen mit lokaler Abschirmung
US7427755B2 (en) * 2005-08-03 2008-09-23 Uchicago Argonne, Llc Integrated electron beam tip and sample heating device for a scanning tunneling microscope
USD695801S1 (en) * 2012-01-11 2013-12-17 Mark J. Hagmann Test fixture for scanning probe microscopy
FR3110026B1 (fr) * 2020-05-05 2022-06-10 Commissariat Energie Atomique Source pulsée d’électrons et système d’analyse de surface comprenant une telle source pulsée

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3631238A (en) * 1969-11-17 1971-12-28 North American Rockwell Method of measuring electric potential on an object surface using auger electron spectroscopy
EP0189498B1 (en) * 1985-01-29 1989-05-03 International Business Machines Corporation Field-emission scanning auger electron microscope
DE3610540A1 (de) * 1986-03-27 1987-10-01 Kernforschungsanlage Juelich Bewegungseinrichtung zur mikrobewegung von objekten
DE3844821C2 (en) * 1988-07-03 1993-07-22 Kfa Juelich Gmbh, 5170 Juelich, De Micromanipulator for raster tunnel microscope

Also Published As

Publication number Publication date
DE59002164D1 (de) 1993-09-09
DE3918249C1 (enExample) 1990-09-13
EP0401658B1 (de) 1993-08-04
US5099117A (en) 1992-03-24
EP0401658A1 (de) 1990-12-12

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