JPH0295235U - - Google Patents
Info
- Publication number
- JPH0295235U JPH0295235U JP320989U JP320989U JPH0295235U JP H0295235 U JPH0295235 U JP H0295235U JP 320989 U JP320989 U JP 320989U JP 320989 U JP320989 U JP 320989U JP H0295235 U JPH0295235 U JP H0295235U
- Authority
- JP
- Japan
- Prior art keywords
- inner tube
- vapor phase
- phase growth
- reaction vessel
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 6
- 239000012495 reaction gas Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 3
- 239000011261 inert gas Substances 0.000 claims 2
- 239000000376 reactant Substances 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP320989U JPH073635Y2 (ja) | 1989-01-13 | 1989-01-13 | 気相成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP320989U JPH073635Y2 (ja) | 1989-01-13 | 1989-01-13 | 気相成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0295235U true JPH0295235U (en:Method) | 1990-07-30 |
| JPH073635Y2 JPH073635Y2 (ja) | 1995-01-30 |
Family
ID=31204639
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP320989U Expired - Lifetime JPH073635Y2 (ja) | 1989-01-13 | 1989-01-13 | 気相成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH073635Y2 (en:Method) |
-
1989
- 1989-01-13 JP JP320989U patent/JPH073635Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH073635Y2 (ja) | 1995-01-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |