JPH0330269U - - Google Patents

Info

Publication number
JPH0330269U
JPH0330269U JP9138689U JP9138689U JPH0330269U JP H0330269 U JPH0330269 U JP H0330269U JP 9138689 U JP9138689 U JP 9138689U JP 9138689 U JP9138689 U JP 9138689U JP H0330269 U JPH0330269 U JP H0330269U
Authority
JP
Japan
Prior art keywords
susceptor
chamber
point
flow channel
wafer mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9138689U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0718765Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9138689U priority Critical patent/JPH0718765Y2/ja
Publication of JPH0330269U publication Critical patent/JPH0330269U/ja
Application granted granted Critical
Publication of JPH0718765Y2 publication Critical patent/JPH0718765Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP9138689U 1989-08-01 1989-08-01 薄膜形成装置 Expired - Fee Related JPH0718765Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9138689U JPH0718765Y2 (ja) 1989-08-01 1989-08-01 薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9138689U JPH0718765Y2 (ja) 1989-08-01 1989-08-01 薄膜形成装置

Publications (2)

Publication Number Publication Date
JPH0330269U true JPH0330269U (en:Method) 1991-03-25
JPH0718765Y2 JPH0718765Y2 (ja) 1995-05-01

Family

ID=31640871

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9138689U Expired - Fee Related JPH0718765Y2 (ja) 1989-08-01 1989-08-01 薄膜形成装置

Country Status (1)

Country Link
JP (1) JPH0718765Y2 (en:Method)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000002780A1 (fr) * 1998-07-08 2000-01-20 Saitama Medicom Co., Ltd. Systeme de confection d'emballages de medicaments
JP2002282340A (ja) * 2001-03-28 2002-10-02 Higashi Nihon Medicom Kk 薬剤の服用時点別包装システム
US7276125B2 (en) 2003-12-22 2007-10-02 Toshiba Ceramics Co., Ltd. Barrel type susceptor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5948789B2 (ja) 2011-10-18 2016-07-06 大日本印刷株式会社 複写帳票

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000002780A1 (fr) * 1998-07-08 2000-01-20 Saitama Medicom Co., Ltd. Systeme de confection d'emballages de medicaments
JP2002282340A (ja) * 2001-03-28 2002-10-02 Higashi Nihon Medicom Kk 薬剤の服用時点別包装システム
US7276125B2 (en) 2003-12-22 2007-10-02 Toshiba Ceramics Co., Ltd. Barrel type susceptor

Also Published As

Publication number Publication date
JPH0718765Y2 (ja) 1995-05-01

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees