JPH0291277U - - Google Patents
Info
- Publication number
- JPH0291277U JPH0291277U JP17157288U JP17157288U JPH0291277U JP H0291277 U JPH0291277 U JP H0291277U JP 17157288 U JP17157288 U JP 17157288U JP 17157288 U JP17157288 U JP 17157288U JP H0291277 U JPH0291277 U JP H0291277U
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- valve body
- valve
- chamber
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005540 biological transmission Effects 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000005192 partition Methods 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Details Of Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988171572U JPH0444948Y2 (cs) | 1988-12-28 | 1988-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988171572U JPH0444948Y2 (cs) | 1988-12-28 | 1988-12-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0291277U true JPH0291277U (cs) | 1990-07-19 |
| JPH0444948Y2 JPH0444948Y2 (cs) | 1992-10-22 |
Family
ID=31463522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988171572U Expired JPH0444948Y2 (cs) | 1988-12-28 | 1988-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0444948Y2 (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3366542B2 (ja) * | 1996-12-25 | 2003-01-14 | 株式会社キッツエスシーティー | ゲートバルブ |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57100732A (en) * | 1980-12-16 | 1982-06-23 | Nec Corp | Dry etching device |
| JPS6323653A (ja) * | 1986-04-30 | 1988-01-30 | エスクラップ―メディテック ゲーエムベーハー | レ−ザ外科手術装置 |
-
1988
- 1988-12-28 JP JP1988171572U patent/JPH0444948Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57100732A (en) * | 1980-12-16 | 1982-06-23 | Nec Corp | Dry etching device |
| JPS6323653A (ja) * | 1986-04-30 | 1988-01-30 | エスクラップ―メディテック ゲーエムベーハー | レ−ザ外科手術装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0444948Y2 (cs) | 1992-10-22 |