JPS6173653U - - Google Patents
Info
- Publication number
- JPS6173653U JPS6173653U JP15824884U JP15824884U JPS6173653U JP S6173653 U JPS6173653 U JP S6173653U JP 15824884 U JP15824884 U JP 15824884U JP 15824884 U JP15824884 U JP 15824884U JP S6173653 U JPS6173653 U JP S6173653U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation source
- vacuum
- thin film
- sample chamber
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 6
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims 4
- 238000005192 partition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000007738 vacuum evaporation Methods 0.000 description 3
- 230000002123 temporal effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15824884U JPS6173653U (cs) | 1984-10-18 | 1984-10-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15824884U JPS6173653U (cs) | 1984-10-18 | 1984-10-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6173653U true JPS6173653U (cs) | 1986-05-19 |
Family
ID=30716230
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15824884U Pending JPS6173653U (cs) | 1984-10-18 | 1984-10-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6173653U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63248465A (ja) * | 1987-04-02 | 1988-10-14 | Toshiba Corp | 低圧プラズマ溶射用容器 |
-
1984
- 1984-10-18 JP JP15824884U patent/JPS6173653U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63248465A (ja) * | 1987-04-02 | 1988-10-14 | Toshiba Corp | 低圧プラズマ溶射用容器 |