JPH0165644U - - Google Patents
Info
- Publication number
- JPH0165644U JPH0165644U JP1987159356U JP15935687U JPH0165644U JP H0165644 U JPH0165644 U JP H0165644U JP 1987159356 U JP1987159356 U JP 1987159356U JP 15935687 U JP15935687 U JP 15935687U JP H0165644 U JPH0165644 U JP H0165644U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- sample
- partition plate
- loading mechanism
- reaction chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987159356U JPH0165644U (cs) | 1987-10-20 | 1987-10-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987159356U JPH0165644U (cs) | 1987-10-20 | 1987-10-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0165644U true JPH0165644U (cs) | 1989-04-26 |
Family
ID=31440494
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987159356U Pending JPH0165644U (cs) | 1987-10-20 | 1987-10-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0165644U (cs) |
-
1987
- 1987-10-20 JP JP1987159356U patent/JPH0165644U/ja active Pending
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