JPS6384868U - - Google Patents
Info
- Publication number
- JPS6384868U JPS6384868U JP18067086U JP18067086U JPS6384868U JP S6384868 U JPS6384868 U JP S6384868U JP 18067086 U JP18067086 U JP 18067086U JP 18067086 U JP18067086 U JP 18067086U JP S6384868 U JPS6384868 U JP S6384868U
- Authority
- JP
- Japan
- Prior art keywords
- material support
- exchange
- vacuum chamber
- support surface
- backward
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18067086U JPS6384868U (cs) | 1986-11-25 | 1986-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18067086U JPS6384868U (cs) | 1986-11-25 | 1986-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6384868U true JPS6384868U (cs) | 1988-06-03 |
Family
ID=31124837
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18067086U Pending JPS6384868U (cs) | 1986-11-25 | 1986-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6384868U (cs) |
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1986
- 1986-11-25 JP JP18067086U patent/JPS6384868U/ja active Pending