JPS6355531U - - Google Patents
Info
- Publication number
- JPS6355531U JPS6355531U JP14785186U JP14785186U JPS6355531U JP S6355531 U JPS6355531 U JP S6355531U JP 14785186 U JP14785186 U JP 14785186U JP 14785186 U JP14785186 U JP 14785186U JP S6355531 U JPS6355531 U JP S6355531U
- Authority
- JP
- Japan
- Prior art keywords
- entrance
- reaction chamber
- lid
- fork
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14785186U JPS6355531U (cs) | 1986-09-29 | 1986-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14785186U JPS6355531U (cs) | 1986-09-29 | 1986-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6355531U true JPS6355531U (cs) | 1988-04-14 |
Family
ID=31061595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14785186U Pending JPS6355531U (cs) | 1986-09-29 | 1986-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6355531U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01183813A (ja) * | 1988-01-18 | 1989-07-21 | Tel Sagami Ltd | 熱処理炉に対する被処理体の搬送装置及び熱処理方法 |
-
1986
- 1986-09-29 JP JP14785186U patent/JPS6355531U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01183813A (ja) * | 1988-01-18 | 1989-07-21 | Tel Sagami Ltd | 熱処理炉に対する被処理体の搬送装置及び熱処理方法 |