JPH0290662U - - Google Patents

Info

Publication number
JPH0290662U
JPH0290662U JP1988170797U JP17079788U JPH0290662U JP H0290662 U JPH0290662 U JP H0290662U JP 1988170797 U JP1988170797 U JP 1988170797U JP 17079788 U JP17079788 U JP 17079788U JP H0290662 U JPH0290662 U JP H0290662U
Authority
JP
Japan
Prior art keywords
oven
evaporation
source
separated
introduction pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1988170797U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988170797U priority Critical patent/JPH0290662U/ja
Publication of JPH0290662U publication Critical patent/JPH0290662U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1988170797U 1988-12-27 1988-12-27 Pending JPH0290662U (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988170797U JPH0290662U (cg-RX-API-DMAC10.html) 1988-12-27 1988-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988170797U JPH0290662U (cg-RX-API-DMAC10.html) 1988-12-27 1988-12-27

Publications (1)

Publication Number Publication Date
JPH0290662U true JPH0290662U (cg-RX-API-DMAC10.html) 1990-07-18

Family

ID=31462051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988170797U Pending JPH0290662U (cg-RX-API-DMAC10.html) 1988-12-27 1988-12-27

Country Status (1)

Country Link
JP (1) JPH0290662U (cg-RX-API-DMAC10.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009057614A (ja) * 2007-09-03 2009-03-19 Canon Inc 蒸着装置及び蒸着方法
JP2010121215A (ja) * 2010-01-14 2010-06-03 Semiconductor Energy Lab Co Ltd 蒸着装置および蒸着方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009057614A (ja) * 2007-09-03 2009-03-19 Canon Inc 蒸着装置及び蒸着方法
JP2010121215A (ja) * 2010-01-14 2010-06-03 Semiconductor Energy Lab Co Ltd 蒸着装置および蒸着方法

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