JPH0287635A - セラミック・パッケージ型半導体装置 - Google Patents

セラミック・パッケージ型半導体装置

Info

Publication number
JPH0287635A
JPH0287635A JP63241479A JP24147988A JPH0287635A JP H0287635 A JPH0287635 A JP H0287635A JP 63241479 A JP63241479 A JP 63241479A JP 24147988 A JP24147988 A JP 24147988A JP H0287635 A JPH0287635 A JP H0287635A
Authority
JP
Japan
Prior art keywords
semiconductor chips
semiconductor device
ceramic package
package
stacked
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63241479A
Other languages
English (en)
Inventor
Nobukazu Ito
信和 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP63241479A priority Critical patent/JPH0287635A/ja
Publication of JPH0287635A publication Critical patent/JPH0287635A/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554—External layer
    • H01L2224/0555—Shape
    • H01L2224/05552—Shape in top view
    • H01L2224/05554—Shape in top view being square
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • H01L2224/29001—Core members of the layer connector
    • H01L2224/29099—Material
    • H01L2224/291—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2224/29138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/29144—Gold [Au] as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32135—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/32145—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
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    • H01L2224/325—Material
    • H01L2224/32505—Material outside the bonding interface, e.g. in the bulk of the layer connector
    • H01L2224/32506—Material outside the bonding interface, e.g. in the bulk of the layer connector comprising an eutectic alloy
    • H—ELECTRICITY
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    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
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    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491—Disposition
    • H01L2224/49105—Connecting at different heights
    • H01L2224/49109—Connecting at different heights outside the semiconductor or solid-state body
    • H—ELECTRICITY
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491—Disposition
    • H01L2224/4912—Layout
    • H01L2224/49175—Parallel arrangements
    • H—ELECTRICITY
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/494—Connecting portions
    • H01L2224/4943—Connecting portions the connecting portions being staggered
    • H01L2224/49433—Connecting portions the connecting portions being staggered outside the semiconductor or solid-state body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01014—Silicon [Si]
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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    • H01L2924/01—Chemical elements
    • H01L2924/01079—Gold [Au]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01082—Lead [Pb]
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013—Alloys
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    • H01L2924/01322—Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/06—Polymers
    • H01L2924/078—Adhesive characteristics other than chemical
    • H—ELECTRICITY
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/14—Integrated circuits
    • H—ELECTRICITY
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/1515—Shape
    • H01L2924/15153—Shape the die mounting substrate comprising a recess for hosting the device
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    • H01L2924/15165—Monolayer substrate
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    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/153—Connection portion
    • H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15312—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a pin array, e.g. PGA
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161—Cap
    • H01L2924/1615—Shape
    • H01L2924/16195—Flat cap [not enclosing an internal cavity]

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はセラミック・パッケージ型半導体装置に関し、
特に半導体チップの搭載構造に関する。
〔従来の技術〕
第４図および第５図はそれぞれ従来のセラミック・パッ
ケージ型半導体装置の部分断面図およびボンディング部
の部分平面図で、従来の半導体装置は、通常、パッケー
ジ２のキャビティ上に半導体チップ１が一個のみ搭載さ
れて、パッケージのリード端子６とボンディング・ワイ
ヤ５によって接続されている。ここで、３はマウント材
、７および８はキャップおよび外部リードをそれぞれ示
す。
〔発明が解決しようとする課題〕
しかしながら、最近急速に進展するＬＳＩ素子の高集積
化に伴い、半導体チップは面積が増加し、またワイヤ・
ボンディング数も増加して来ている。従って、上述した
従来の半導体装置では、限られたスペース内で半導体チ
ップの専有面積を増加させ、またボンディング・ワイヤ
数を増やさなければならなくなって来ている。この結果
、ボンディング・ワイヤ間のショートの危険性が増し、
半導体素子を保護するパッケージ設計にますます困難度
が高まっている。
本発明の目的は、上記の情況に鑑み、半導体チツブの高
密度実装を可能としたセラミック・パッケージ型半導体
装置を提供することである。
〔課題を解決するための手段〕
本発明によれば、セラミック・パッケージ型半導体装置
は、複数個のリード端子をキャビティ内に段階状に形成
するセラミック・パッケージと、前記セラミック・パッ
ケージのキャビティ内に段重ねで搭載される複数個の半
導体チップと、前記半導体チップと段階状のリード端子
をそれぞれ接続する複数個のボンディング・ワイヤとを
含んで構成される。
〔実施例〕
次に、本発明について図面を参照して説゛明する。
第１図および第２図はそれぞれ本発明の一実施例を示す
セラミック・パッケージ型半導体装置の部分断面図およ
びボンディング部の部分平面図である。本実施例によれ
ば、２つの半導体チップｌａ、ｌｂがパッケージ２のキ
ャビティ部に２段重ねに搭載され、階段状に設けられた
それぞれのパッケージのリード端子６とボンディング・
ワイヤ５で接続される。この際、下段のチップ１ａはＡ
ｕ−８ｉ共共晶台や樹脂ペースト接着などのマウント材
３でマウントされ、また、上段のチップ１ｂは下段のチ
ップｌａ上に樹脂などの非導電性接着剤４で固着される
。ここで、７および８はそれぞれキャップおよび外部リ
ードである。
第３図は本発明の他の実施例を示すセラミック・パッケ
ージ型半導体装置のボンディング部の部分平面図である
。本実施例によれば、２段重ねされた２つの半導体チッ
プｌａ、ｌｂ同志がボンディング・ワイヤ５で接続され
るにれによると、２個のチップが互いに接続されるため
回路設計上の応用が拡がるという利点がある。
〔発明の効果〕
以上説明したように、本発明によれば、半導体チップを
段重ねにしてそれぞれをワイヤ・ボンディングするので
、特に二段ボンディングの場合では従来構造と比べると
、ボンディング・ワイヤの高低差が広くなり、ワイヤ・
ショートの危険性が減少する。また、−個のチップの場
合と比べてチップそれぞれのパッド・ピッチは２倍に拡
がり、隣り合うパッドとの間隔も広くなるので、多ピン
、高密度のワイヤ・ボンディングに有効である。またチ
ップを縦方向に重ねるので、チップの専有面積を小さく
することができ、余裕のあるパッケージ設計を可能とす
る効果を有する。
材、５・・・ボンディング・ワイヤ、６・・・リード端
子、７・・・キャップ、８・・・外部リード。

Claims (1)

    【特許請求の範囲】
  1. 複数個のリード端子をキャビティ内に段階状に形成する
    セラミック・パッケージと、前記セラミック・パッケー
    ジのキャビティ内に段重ねで搭載される複数個の半導体
    チップと、前記半導体チップと段階状のリード端子をそ
    れぞれ接続する複数個のボンディング・ワイヤとを備え
    ることを特徴とするセラミック・パッケージ型半導体装
    置。
JP63241479A 1988-09-26 1988-09-26 セラミック・パッケージ型半導体装置 Pending JPH0287635A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63241479A JPH0287635A (ja) 1988-09-26 1988-09-26 セラミック・パッケージ型半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63241479A JPH0287635A (ja) 1988-09-26 1988-09-26 セラミック・パッケージ型半導体装置

Publications (1)

Publication Number Publication Date
JPH0287635A true JPH0287635A (ja) 1990-03-28

Family

ID=17074926

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63241479A Pending JPH0287635A (ja) 1988-09-26 1988-09-26 セラミック・パッケージ型半導体装置

Country Status (1)

Country Link
JP (1) JPH0287635A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990056764A (ko) * 1997-12-29 1999-07-15 김영환 볼 그리드 어레이 패키지
KR19990061323A (ko) * 1997-12-31 1999-07-26 윤종용 반도체 패키지
CN117038646A (zh) * 2023-10-08 2023-11-10 之江实验室 陶瓷封装结构及其设计方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5731166A (en) * 1980-07-31 1982-02-19 Fujitsu Ltd Semiconductor device
JPS6370532A (ja) * 1986-09-12 1988-03-30 Hitachi Ltd 半導体装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5731166A (en) * 1980-07-31 1982-02-19 Fujitsu Ltd Semiconductor device
JPS6370532A (ja) * 1986-09-12 1988-03-30 Hitachi Ltd 半導体装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990056764A (ko) * 1997-12-29 1999-07-15 김영환 볼 그리드 어레이 패키지
KR19990061323A (ko) * 1997-12-31 1999-07-26 윤종용 반도체 패키지
CN117038646A (zh) * 2023-10-08 2023-11-10 之江实验室 陶瓷封装结构及其设计方法
CN117038646B (zh) * 2023-10-08 2024-01-26 之江实验室 陶瓷封装结构及其设计方法

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