JPH0284323U - - Google Patents
Info
- Publication number
- JPH0284323U JPH0284323U JP16487388U JP16487388U JPH0284323U JP H0284323 U JPH0284323 U JP H0284323U JP 16487388 U JP16487388 U JP 16487388U JP 16487388 U JP16487388 U JP 16487388U JP H0284323 U JPH0284323 U JP H0284323U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- spacer
- metal mask
- wafer holder
- vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 125000006850 spacer group Chemical group 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 claims 1
- 230000008021 deposition Effects 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例を示す縦断面図、第
２図は第１図のＡ部の拡大図、第３図は従来の蒸
着用半導体ウエハホルダを示す縦断面図、第４図
は第３図のＢ部の拡大図である。
４…スペーサ、４ａ…スペーサの波状溝、５…
半導体ウエハ、６…メタルマスク。
FIG. 1 is a vertical cross-sectional view showing an embodiment of the present invention, FIG. 2 is an enlarged view of part A in FIG. 1, FIG. 3 is a vertical cross-sectional view showing a conventional semiconductor wafer holder for deposition, and FIG. 4 is an enlarged view of section B in FIG. 3. FIG. 4... Spacer, 4a... Wavy groove of spacer, 5...
Semiconductor wafer, 6...metal mask.
Claims (1)
に蒸着するウエハホルダにおいて、半導体ウエハ
をメタルマスク上に固定するスペーサを半円球状
の形状に構成し、かつその内側に波状の溝をラン
ダムに有することを特徴とする蒸着用半導体ウエ
ハホルダ。 In a wafer holder that selectively deposits vapor on a semiconductor wafer using a metal mask, the spacer for fixing the semiconductor wafer on the metal mask is configured in a semicircular shape, and has wavy grooves randomly inside the spacer. Features: Semiconductor wafer holder for vapor deposition.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16487388U JPH0284323U (en) | 1988-12-20 | 1988-12-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16487388U JPH0284323U (en) | 1988-12-20 | 1988-12-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0284323U true JPH0284323U (en) | 1990-06-29 |
Family
ID=31450851
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16487388U Pending JPH0284323U (en) | 1988-12-20 | 1988-12-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0284323U (en) |
-
1988
- 1988-12-20 JP JP16487388U patent/JPH0284323U/ja active Pending
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