JPH028149B2 - - Google Patents

Info

Publication number
JPH028149B2
JPH028149B2 JP56150586A JP15058681A JPH028149B2 JP H028149 B2 JPH028149 B2 JP H028149B2 JP 56150586 A JP56150586 A JP 56150586A JP 15058681 A JP15058681 A JP 15058681A JP H028149 B2 JPH028149 B2 JP H028149B2
Authority
JP
Japan
Prior art keywords
fluid
pump
fluid pressure
pressure
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56150586A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5853686A (ja
Inventor
Eiichi Sugano
Takao Ide
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ORUGANO KK
ZETSUTO KOGYO KK
Original Assignee
ORUGANO KK
ZETSUTO KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ORUGANO KK, ZETSUTO KOGYO KK filed Critical ORUGANO KK
Priority to JP56150586A priority Critical patent/JPS5853686A/ja
Publication of JPS5853686A publication Critical patent/JPS5853686A/ja
Publication of JPH028149B2 publication Critical patent/JPH028149B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B9/00—Piston machines or pumps characterised by the driving or driven means to or from their working members
    • F04B9/08—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid
    • F04B9/10—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being liquid
    • F04B9/103—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being liquid having only one pumping chamber
    • F04B9/107—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being liquid having only one pumping chamber rectilinear movement of the pumping member in the working direction being obtained by a single-acting liquid motor, e.g. actuated in the other direction by gravity or a spring

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
JP56150586A 1981-09-25 1981-09-25 流体圧駆動式定量ポンプ Granted JPS5853686A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56150586A JPS5853686A (ja) 1981-09-25 1981-09-25 流体圧駆動式定量ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56150586A JPS5853686A (ja) 1981-09-25 1981-09-25 流体圧駆動式定量ポンプ

Publications (2)

Publication Number Publication Date
JPS5853686A JPS5853686A (ja) 1983-03-30
JPH028149B2 true JPH028149B2 (enrdf_load_stackoverflow) 1990-02-22

Family

ID=15500119

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56150586A Granted JPS5853686A (ja) 1981-09-25 1981-09-25 流体圧駆動式定量ポンプ

Country Status (1)

Country Link
JP (1) JPS5853686A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100332951B1 (ko) * 1999-08-11 2002-04-20 윤종용 반도체 설비용 케미컬 정량 공급 장치
WO2005088129A1 (ja) * 2004-03-15 2005-09-22 Koganei Corporation 薬液供給装置
FR3039862B1 (fr) * 2015-08-06 2017-08-11 Dosatron International Dispositif de dosage proportionnel supervise et procedes de supervision d'une pompe doseuse

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS591352B2 (ja) * 1975-10-16 1984-01-11 カブシキガイシヤ マルヤマセイサクシヨ チユウニユウポンプ
JPS6240126Y2 (enrdf_load_stackoverflow) * 1979-10-20 1987-10-14
JPS6324481Y2 (enrdf_load_stackoverflow) * 1980-02-15 1988-07-05

Also Published As

Publication number Publication date
JPS5853686A (ja) 1983-03-30

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