JPH0281323A - ロータリーエンコーダ用磁気ディスクの製造方法 - Google Patents
ロータリーエンコーダ用磁気ディスクの製造方法Info
- Publication number
- JPH0281323A JPH0281323A JP23426588A JP23426588A JPH0281323A JP H0281323 A JPH0281323 A JP H0281323A JP 23426588 A JP23426588 A JP 23426588A JP 23426588 A JP23426588 A JP 23426588A JP H0281323 A JPH0281323 A JP H0281323A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- targets
- disk
- target
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 69
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 239000000758 substrate Substances 0.000 claims abstract description 31
- 238000004544 sputter deposition Methods 0.000 claims abstract description 24
- 230000005684 electric field Effects 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims description 15
- 238000000151 deposition Methods 0.000 claims description 13
- 239000003302 ferromagnetic material Substances 0.000 claims description 12
- 230000008021 deposition Effects 0.000 claims description 11
- 239000000463 material Substances 0.000 abstract description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052782 aluminium Inorganic materials 0.000 abstract description 4
- 238000007740 vapor deposition Methods 0.000 abstract description 3
- 238000010438 heat treatment Methods 0.000 abstract description 2
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 abstract 2
- 239000010409 thin film Substances 0.000 description 16
- 239000000696 magnetic material Substances 0.000 description 10
- 239000007789 gas Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 239000003973 paint Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 239000006247 magnetic powder Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- KPLQYGBQNPPQGA-UHFFFAOYSA-N cobalt samarium Chemical compound [Co].[Sm] KPLQYGBQNPPQGA-UHFFFAOYSA-N 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 229910001004 magnetic alloy Inorganic materials 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 229910000938 samarium–cobalt magnet Inorganic materials 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
Landscapes
- Transmission And Conversion Of Sensor Element Output (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23426588A JPH0281323A (ja) | 1988-09-19 | 1988-09-19 | ロータリーエンコーダ用磁気ディスクの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23426588A JPH0281323A (ja) | 1988-09-19 | 1988-09-19 | ロータリーエンコーダ用磁気ディスクの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0281323A true JPH0281323A (ja) | 1990-03-22 |
| JPH044530B2 JPH044530B2 (enrdf_load_stackoverflow) | 1992-01-28 |
Family
ID=16968261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23426588A Granted JPH0281323A (ja) | 1988-09-19 | 1988-09-19 | ロータリーエンコーダ用磁気ディスクの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0281323A (enrdf_load_stackoverflow) |
-
1988
- 1988-09-19 JP JP23426588A patent/JPH0281323A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH044530B2 (enrdf_load_stackoverflow) | 1992-01-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080128 Year of fee payment: 16 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090128 Year of fee payment: 17 |
|
| EXPY | Cancellation because of completion of term | ||
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090128 Year of fee payment: 17 |