JPH027540U - - Google Patents
Info
- Publication number
- JPH027540U JPH027540U JP8649988U JP8649988U JPH027540U JP H027540 U JPH027540 U JP H027540U JP 8649988 U JP8649988 U JP 8649988U JP 8649988 U JP8649988 U JP 8649988U JP H027540 U JPH027540 U JP H027540U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- sensor chip
- sensor
- introduction path
- flexible resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011347 resin Substances 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図はこの考案による圧力センサを示す概略
断面説明図、第２図は従来の圧力センサを示す概
略断面説明図である。
１，２１……基板、２，３，５，１０，２２，
２３，２５，３０……貫通孔、４，２４……支持
部材、６，２６……センサチツプ、７，２７……
ケーシング、８，２８……リード線、９，２９…
…パイプ、１１，３１……圧力導入路、１１ａ，
３１ａ……圧力導入口、１２……可撓性樹脂、Ａ
……ポート、Ｂ……空間。
FIG. 1 is a schematic cross-sectional explanatory diagram showing a pressure sensor according to this invention, and FIG. 2 is a schematic cross-sectional explanatory diagram showing a conventional pressure sensor. 1, 21...Substrate, 2, 3, 5, 10, 22,
23, 25, 30... Through hole, 4, 24... Support member, 6, 26... Sensor chip, 7, 27...
Casing, 8, 28... Lead wire, 9, 29...
...Pipe, 11, 31...Pressure introduction path, 11a,
31a...Pressure introduction port, 12...Flexible resin, A
...Port, B...Space.
Claims (1)
状態で、前記センサチツプの他端に圧力導入路を
介して検出圧力を印加する圧力センサにおいて、
前記圧力導入路に可撓性樹脂を封入し、この可撓
性樹脂を介して検出圧力を、前記センサチツプに
印加するようにしたことを特徴とする圧力センサ
。 A pressure sensor in which a reference pressure is applied to one end of the sensor chip, and in this state, a detected pressure is applied to the other end of the sensor chip via a pressure introduction path,
A pressure sensor characterized in that the pressure introduction path is sealed with a flexible resin, and the detected pressure is applied to the sensor chip via the flexible resin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8649988U JPH027540U (en) | 1988-06-29 | 1988-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8649988U JPH027540U (en) | 1988-06-29 | 1988-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH027540U true JPH027540U (en) | 1990-01-18 |
Family
ID=31311138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8649988U Pending JPH027540U (en) | 1988-06-29 | 1988-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH027540U (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60171429A (en) * | 1984-02-17 | 1985-09-04 | Citizen Watch Co Ltd | Pressure-electricity converter |
| JPS61246642A (en) * | 1985-04-24 | 1986-11-01 | Nippon Denso Co Ltd | Pressure sensor |
| JPS6317431B2 (en) * | 1985-03-08 | 1988-04-13 | Shinwa Elec Works |
-
1988
- 1988-06-29 JP JP8649988U patent/JPH027540U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60171429A (en) * | 1984-02-17 | 1985-09-04 | Citizen Watch Co Ltd | Pressure-electricity converter |
| JPS6317431B2 (en) * | 1985-03-08 | 1988-04-13 | Shinwa Elec Works | |
| JPS61246642A (en) * | 1985-04-24 | 1986-11-01 | Nippon Denso Co Ltd | Pressure sensor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH027540U (en) | ||
| JPS6228153U (en) | ||
| JPH0465451U (en) | ||
| JPS5837530U (en) | pressure detection device | |
| JPS6367267U (en) | ||
| JPS6111532U (en) | Packaging box with sensing function | |
| JPH0235046U (en) | ||
| JPH0272949U (en) | ||
| JPS59179352U (en) | semiconductor pressure sensor | |
| JPS63131154U (en) | ||
| JPH01134234U (en) | ||
| JPS62196356U (en) | ||
| JPS6159355U (en) | ||
| JPH01140843U (en) | ||
| JPH01179237U (en) | ||
| JPS6370160U (en) | ||
| JPH01127268U (en) | ||
| JPH01127258U (en) | ||
| JPS61177321U (en) | ||
| JPH0313748U (en) | ||
| JPS6219759U (en) | ||
| JPS5849240U (en) | Resin molded parts for semiconductor pressure sensors | |
| JPH0467346U (en) | ||
| JPS5877444U (en) | absolute pressure transmitter | |
| JPS6249254U (en) |