JPH027503B2 - - Google Patents
Info
- Publication number
- JPH027503B2 JPH027503B2 JP58181535A JP18153583A JPH027503B2 JP H027503 B2 JPH027503 B2 JP H027503B2 JP 58181535 A JP58181535 A JP 58181535A JP 18153583 A JP18153583 A JP 18153583A JP H027503 B2 JPH027503 B2 JP H027503B2
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- ion
- filter
- focusing
- type filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 35
- 150000002500 ions Chemical class 0.000 claims description 11
- 238000010586 diagram Methods 0.000 description 5
- 238000000605 extraction Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58181535A JPS6074249A (ja) | 1983-09-29 | 1983-09-29 | イオンビ−ム装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58181535A JPS6074249A (ja) | 1983-09-29 | 1983-09-29 | イオンビ−ム装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6074249A JPS6074249A (ja) | 1985-04-26 |
| JPH027503B2 true JPH027503B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-02-19 |
Family
ID=16102471
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58181535A Granted JPS6074249A (ja) | 1983-09-29 | 1983-09-29 | イオンビ−ム装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6074249A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62172650A (ja) * | 1986-01-23 | 1987-07-29 | Jeol Ltd | 集束イオンビ−ム装置 |
| AT391771B (de) * | 1987-03-05 | 1990-11-26 | Ims Ionen Mikrofab Syst | Einrichtung zur verkleinernden oder 1 : 1 ionenprojektionslithographie |
| JPS6441885U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1987-09-07 | 1989-03-13 | ||
| JP4671223B2 (ja) * | 2005-04-22 | 2011-04-13 | エスアイアイ・ナノテクノロジー株式会社 | 集束イオンビームによる加工方法及び集束イオンビーム加工装置 |
-
1983
- 1983-09-29 JP JP58181535A patent/JPS6074249A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6074249A (ja) | 1985-04-26 |