JPH027500B2 - - Google Patents
Info
- Publication number
- JPH027500B2 JPH027500B2 JP58134405A JP13440583A JPH027500B2 JP H027500 B2 JPH027500 B2 JP H027500B2 JP 58134405 A JP58134405 A JP 58134405A JP 13440583 A JP13440583 A JP 13440583A JP H027500 B2 JPH027500 B2 JP H027500B2
- Authority
- JP
- Japan
- Prior art keywords
- liquid metal
- needle
- emitter
- ion source
- metal ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910001338 liquidmetal Inorganic materials 0.000 claims description 111
- 150000002500 ions Chemical class 0.000 claims description 71
- 238000003860 storage Methods 0.000 claims description 50
- 239000000463 material Substances 0.000 claims description 21
- 238000000605 extraction Methods 0.000 claims description 10
- 239000004020 conductor Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 description 90
- 239000002184 metal Substances 0.000 description 90
- 238000010438 heat treatment Methods 0.000 description 24
- 238000010884 ion-beam technique Methods 0.000 description 13
- 238000002844 melting Methods 0.000 description 12
- 150000002739 metals Chemical class 0.000 description 11
- 238000006243 chemical reaction Methods 0.000 description 10
- 230000008018 melting Effects 0.000 description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 229910052799 carbon Inorganic materials 0.000 description 6
- 238000001816 cooling Methods 0.000 description 6
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 3
- 238000007711 solidification Methods 0.000 description 3
- 230000008023 solidification Effects 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- -1 W and Ni Chemical class 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910000967 As alloy Inorganic materials 0.000 description 1
- 241001391944 Commicarpus scandens Species 0.000 description 1
- 241001272720 Medialuna californiensis Species 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004452 microanalysis Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58134405A JPS6028147A (ja) | 1983-07-25 | 1983-07-25 | 液体金属イオン源 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58134405A JPS6028147A (ja) | 1983-07-25 | 1983-07-25 | 液体金属イオン源 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6028147A JPS6028147A (ja) | 1985-02-13 |
| JPH027500B2 true JPH027500B2 (enrdf_load_stackoverflow) | 1990-02-19 |
Family
ID=15127614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58134405A Granted JPS6028147A (ja) | 1983-07-25 | 1983-07-25 | 液体金属イオン源 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6028147A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0726808U (ja) * | 1994-10-11 | 1995-05-19 | 矢崎総業株式会社 | スペーサー型光ファイバケーブル |
| WO2007080594A2 (en) * | 2006-01-13 | 2007-07-19 | Technion Research & Development Foundation Ltd. | Method and apparatus for generating ion beam |
-
1983
- 1983-07-25 JP JP58134405A patent/JPS6028147A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6028147A (ja) | 1985-02-13 |
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