JPH02812B2 - - Google Patents

Info

Publication number
JPH02812B2
JPH02812B2 JP60098068A JP9806885A JPH02812B2 JP H02812 B2 JPH02812 B2 JP H02812B2 JP 60098068 A JP60098068 A JP 60098068A JP 9806885 A JP9806885 A JP 9806885A JP H02812 B2 JPH02812 B2 JP H02812B2
Authority
JP
Japan
Prior art keywords
ion
ionized metal
emitter
heating element
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60098068A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60236431A (ja
Inventor
Yukio Honda
Tadanori Taguchi
Toshuki Aida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60098068A priority Critical patent/JPS60236431A/ja
Publication of JPS60236431A publication Critical patent/JPS60236431A/ja
Publication of JPH02812B2 publication Critical patent/JPH02812B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
JP60098068A 1985-05-10 1985-05-10 拡散補給形のｅｈｄイオン源 Granted JPS60236431A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60098068A JPS60236431A (ja) 1985-05-10 1985-05-10 拡散補給形のｅｈｄイオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60098068A JPS60236431A (ja) 1985-05-10 1985-05-10 拡散補給形のｅｈｄイオン源

Publications (2)

Publication Number Publication Date
JPS60236431A JPS60236431A (ja) 1985-11-25
JPH02812B2 true JPH02812B2 (enrdf_load_stackoverflow) 1990-01-09

Family

ID=14210017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60098068A Granted JPS60236431A (ja) 1985-05-10 1985-05-10 拡散補給形のｅｈｄイオン源

Country Status (1)

Country Link
JP (1) JPS60236431A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04179303A (ja) * 1990-11-13 1992-06-26 Dx Antenna Co Ltd 平面アンテナ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5812703B2 (ja) * 1978-08-12 1983-03-09 大阪大学長 イオン源装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04179303A (ja) * 1990-11-13 1992-06-26 Dx Antenna Co Ltd 平面アンテナ

Also Published As

Publication number Publication date
JPS60236431A (ja) 1985-11-25

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