JPH02740Y2 - - Google Patents

Info

Publication number
JPH02740Y2
JPH02740Y2 JP1977055206U JP5520677U JPH02740Y2 JP H02740 Y2 JPH02740 Y2 JP H02740Y2 JP 1977055206 U JP1977055206 U JP 1977055206U JP 5520677 U JP5520677 U JP 5520677U JP H02740 Y2 JPH02740 Y2 JP H02740Y2
Authority
JP
Japan
Prior art keywords
mask material
protective film
hard mask
chromium
vinyl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1977055206U
Other languages
English (en)
Japanese (ja)
Other versions
JPS53149565U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977055206U priority Critical patent/JPH02740Y2/ja
Publication of JPS53149565U publication Critical patent/JPS53149565U/ja
Application granted granted Critical
Publication of JPH02740Y2 publication Critical patent/JPH02740Y2/ja
Expired legal-status Critical Current

Links

JP1977055206U 1977-04-30 1977-04-30 Expired JPH02740Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977055206U JPH02740Y2 (enExample) 1977-04-30 1977-04-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977055206U JPH02740Y2 (enExample) 1977-04-30 1977-04-30

Publications (2)

Publication Number Publication Date
JPS53149565U JPS53149565U (enExample) 1978-11-25
JPH02740Y2 true JPH02740Y2 (enExample) 1990-01-10

Family

ID=28950769

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977055206U Expired JPH02740Y2 (enExample) 1977-04-30 1977-04-30

Country Status (1)

Country Link
JP (1) JPH02740Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7678508B2 (en) * 2003-03-31 2010-03-16 Hoya Corporation Method of manufacturing mask blank and method of manufacturing mask

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49105469A (enExample) * 1973-02-07 1974-10-05
JPS519451A (en) * 1974-07-12 1976-01-26 Nitto Electric Ind Co Fuirumuno hakurihoho

Also Published As

Publication number Publication date
JPS53149565U (enExample) 1978-11-25

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