JPH0273730U - - Google Patents
Info
- Publication number
- JPH0273730U JPH0273730U JP15349088U JP15349088U JPH0273730U JP H0273730 U JPH0273730 U JP H0273730U JP 15349088 U JP15349088 U JP 15349088U JP 15349088 U JP15349088 U JP 15349088U JP H0273730 U JPH0273730 U JP H0273730U
- Authority
- JP
- Japan
- Prior art keywords
- furnace core
- core tube
- tube structure
- heat treatment
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988153490U JPH0625000Y2 (ja) | 1988-11-28 | 1988-11-28 | 炉芯管構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988153490U JPH0625000Y2 (ja) | 1988-11-28 | 1988-11-28 | 炉芯管構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0273730U true JPH0273730U (enExample) | 1990-06-05 |
| JPH0625000Y2 JPH0625000Y2 (ja) | 1994-06-29 |
Family
ID=31429376
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988153490U Expired - Lifetime JPH0625000Y2 (ja) | 1988-11-28 | 1988-11-28 | 炉芯管構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0625000Y2 (enExample) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54103750U (enExample) * | 1977-12-29 | 1979-07-21 | ||
| JPS57135733U (enExample) * | 1981-02-20 | 1982-08-24 | ||
| JPS57201030A (en) * | 1981-06-05 | 1982-12-09 | Oki Electric Ind Co Ltd | Heat treatment for semiconductor wafer |
| JPS6245128A (ja) * | 1985-08-23 | 1987-02-27 | Toshiba Corp | 外部燃焼装置 |
-
1988
- 1988-11-28 JP JP1988153490U patent/JPH0625000Y2/ja not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54103750U (enExample) * | 1977-12-29 | 1979-07-21 | ||
| JPS57135733U (enExample) * | 1981-02-20 | 1982-08-24 | ||
| JPS57201030A (en) * | 1981-06-05 | 1982-12-09 | Oki Electric Ind Co Ltd | Heat treatment for semiconductor wafer |
| JPS6245128A (ja) * | 1985-08-23 | 1987-02-27 | Toshiba Corp | 外部燃焼装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0625000Y2 (ja) | 1994-06-29 |