JPH0226227U - - Google Patents
Info
- Publication number
- JPH0226227U JPH0226227U JP10363688U JP10363688U JPH0226227U JP H0226227 U JPH0226227 U JP H0226227U JP 10363688 U JP10363688 U JP 10363688U JP 10363688 U JP10363688 U JP 10363688U JP H0226227 U JPH0226227 U JP H0226227U
- Authority
- JP
- Japan
- Prior art keywords
- dust collection
- semiconductor manufacturing
- manufacturing equipment
- collection cylinder
- electrode plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000004140 cleaning Methods 0.000 claims 1
- 239000012212 insulator Substances 0.000 claims 1
- 239000000463 material Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10363688U JPH0226227U (enExample) | 1988-08-04 | 1988-08-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10363688U JPH0226227U (enExample) | 1988-08-04 | 1988-08-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0226227U true JPH0226227U (enExample) | 1990-02-21 |
Family
ID=31334649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10363688U Pending JPH0226227U (enExample) | 1988-08-04 | 1988-08-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0226227U (enExample) |
-
1988
- 1988-08-04 JP JP10363688U patent/JPH0226227U/ja active Pending