JPH0273041U - - Google Patents
Info
- Publication number
- JPH0273041U JPH0273041U JP15385988U JP15385988U JPH0273041U JP H0273041 U JPH0273041 U JP H0273041U JP 15385988 U JP15385988 U JP 15385988U JP 15385988 U JP15385988 U JP 15385988U JP H0273041 U JPH0273041 U JP H0273041U
- Authority
- JP
- Japan
- Prior art keywords
- source chamber
- plasma
- ion source
- ion
- coaxial line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 2
- 238000010884 ion-beam technique Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 230000001902 propagating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15385988U JPH0273041U (enExample) | 1988-11-25 | 1988-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15385988U JPH0273041U (enExample) | 1988-11-25 | 1988-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0273041U true JPH0273041U (enExample) | 1990-06-04 |
Family
ID=31430072
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15385988U Pending JPH0273041U (enExample) | 1988-11-25 | 1988-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0273041U (enExample) |
-
1988
- 1988-11-25 JP JP15385988U patent/JPH0273041U/ja active Pending
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